JUSUNG PECVD 设备说明(1)

Safety Manual CYCLONE TM PLUS JUSUNG Engineering Co., Ltd. Page Revision 1.0 1-1 User’s ManualPreliminary World’s Best People, World’s Best Products, World’s Best Company Solar Cell System User’s Manual In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 1 - Contents I. Safety 1.1 Safety Hazard Alert ……………………………………………………… 1-3 1.2 Factors with safety caution ……………………………………………… 1-7 1.3 Guidance to the safety of the system ………………………………… 1-8 1.4 Emergency Off(EMO) …………………………………………………… 1-10 1.5 Mechanical Hazards……………………………………………………… 1-12 1.6 Electric Hazards …………………………………………………………… 1-19 1.7 Gas Hazards ……………………………………………………………… 1-21 1.8 Thermal Hazard …………………………………………………………… 1-33 1.9 Fire and Explosion Hazards …………………………………………… 1-36 1.10 Laser Hazards …………………………………………………………… 1-41 1.11 Vacuum Hazards ………………………………………………………… 1-42 1.12 Environmental Hazards ………………………………………………… 1-44 1.13 RF Hazard ………………………………………………………………… 1-45 1.14 Other Danger …………………………………………………………… 1-46 1.15 Guide in Accident by High-pressure Gas …………………………… 1-48 1.16 Guid in Accident by Gas poisoning …………………………………… 1-50 1.17 Ventilation of Gas Cabinet …………………………………………… 1-51 1.18 Gas handing with safety caution ……………………………………… 1-53 1.19 Lockout/Tagout procedure …………………………………………… 1-54 1.20 Types and Location of Interlocks …………………………………… 1-57 1.21 Safety label location …………………………………………………… 1-62 1.22 Specialty Gas Material Safety Data Sheet …………………………… 1-66 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 2 - II. Functional Description 2.1 System Overview …………………………………………………………… 2-1 2.2 Hardware Specification …………………………………………………… 2-2 2.3 Transfer Chamber ………………………………………………………… 2-3 2.4 Load Lock Chamber ……………………………………………………… 2-6 2.5 Pre heat Chamber………………………………………………………… 2-7 2.6 Load lock & pre heat chamber…………………………………………… 2-8 2.7 PECVD Single Substrate Process Chamber…………………………… 2-10 2.8 MOCVD Single Substrate Process Chamber ………………………… 2-13 2.9 Gas Rack (Gas Delivery System)………………………………………… 2-15 2.10 Chamber Cooling System……………………………………………… 2-37 2.11 Vacuum System ………………………………………………………… 2-42 2.12 Heater System…………………………………………………………… 2-50 2.13 RF Plasma System………………………………………………………… 2-53 III. Installatoin 3.1 Site Requirement …………………………………………………………… 3-2 3.2 Floor Space and Loading ………………………………………………… 3-2 3.3 Site Requirements for Moving the system……………………………… 3-2 3.4 Initial Inspection …………………………………………………………… 3-2 3.5 Environments ……………………………………………………………… 3-3 3.6 Inspection prior to executing Power-on……………………………… 3-4 3.7 Power-On execution procedure………………………………………… 3-5 3.8 Power-Off procedure …………………………………………………… 3-6 3.9 Ventilating Gas Cabinet…………………………………………………… 3-6 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 3 - 3.10 Packing and transporting ……………………………………………… 3-7 3.11 System Trun Off Procedure …………………………………………… 3-7 3.12 System Trun On Procedure …………………………………………… 3-8 3.13 Abnormal operation of Process or Transfer Chamber …………… 3-9 3.14 Emergency Off (EMO) …………………………………………………… 3-10 IV. Facility Requirements 4.1 System Overview…………………………………………………………… 4-2 4.2 Electrical Power Diagram ………………………………………………… 4-4 4.3 GN2 Facility Requirement………………………………………………… 4-10 4.4 CDA Facility Requirement ………………………………………………… 4-16 4.5 PCW Facility Requirement ……………………………………………… 4-19 4.6 City Water Facility Requirement ………………………………………… 4-22 4.7 Drain(Acid) Facility Requirement ……………………………………… 4-24 4.8 General Exhaust Facility Requirement ………………………………… 4-26 4.9 Toxic Exhaust Facility Requirement …………………………………… 4-28 4.10 Pumping Line Facility Requirement …………………………………… 4-31 4.11 Specialty Gas Facility Requirement …………………………………… 4-34 4.12 DI Water Facility Requirement …………………………………… 4-39 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 4 - V. Operation 5.1. GUI (Graphic User Interface) ………………………………………………… 5-2 5.1.1. Structure of GUI ……………………………………………………… 5-2 5.1.2. The Layout Screen of GUI…………………………………………… 5-3 5.1.2.1 PC Screen Map …………………………………………………… 5-3 5.1.2.2 Top Panel …………………………………………………………… 5-4 5.1.2.3 Bottom Panel ……………………………………………………… 5-4 5.1.3. Log Off Screen………………………………………………………… 5-5 5.2 Easy Screen ……………………………………………………………………… 5-6 5.2.1 Easy Screen Jobs …………………………………………………… 5-6 5.2.2 Easy Screen TM/LL/HT Chamber Popup………………………… 5-8 5.2.3 Easy Screen PMx Chamber Popup ……………………………… 5-10 5.3 Jobs Screen ……………………………………………………………………… 5-12 5.3.1 Jobs Screen Main …………………………………………………… 5-12 5.3.2 Jobs Screen Process Module’s System Status ………………… 5-14 5.3.3 Jobs Screen Transter Module’s System Status ………………… 5-14 5.3.4 Jobs Screen Heat Chamber System Status …………………… 5-15 5.3.5 Jobs Screen Load-lock System Status ………………………… 5-15 5.3.6 Jobs Screen PIO System Status ………………………………… 5-16 5.3.6.1 PIO System Screen PIO Status Popup ……………………… 5-17 5.4 System Screen …………………………………………………………………… 5-19 5.4.1 System Screen TMC ………………………………………………… 5-19 5.4.1.1 TMC System Control …………………………………………… 5-19 5.4.1.1.1 TMC System Control Vacuum System ……………… 5-20 5.4.1.1.2 TMC System Control TM System Status…………… 5-20 5.4.1.1.3 TMC System Control Heat Chamber System Status 5-21 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 5 - 5.4.1.1.4 TMCSystem ControlProcess Module System Status 5-21 5.4.1.1.5 TMCSystem ControlLoad-lock System Status……… 5-22 5.4.1.1.6 TMCSystem ControlLoad-lock Command Panel …… 5-23 5.4.1.1.7 TMCSystem ControlHeat Chamber Command Panel 5-24 5.4.1.1.8 TMCSystem ControlLamp Heater Popup ……………… 5-25 5.4.1.1.9 TMCSystem ControlTM&Vac.Robot Command Panel 5-26 5.4.1.1.10 TMCSystem ControlVac.Robot Popup ……………… 5-27 5.4.1.1.11 TMCSystem ControlTM Transfer Popup …………… 5-28 5.4.1.2 TMC Glass Synchronize ……………………………………… 5-29 5.4.1.3 TMC I/O Monitor ………………………………………………… 5-30 5.4.2 System Screen PMx (PECVD) ……………………………………… 5-31 5.4.2.1 PMx(PECVD) Chamber ………………………………………… 5-31 5.4.2.1.1 PMx(PECVD) Chamber Process Status……………… 5-31 5.4.2.1.2 PMx(PECVD) Chamber Chuck U/D Motor ………… 5-32 5.4.2.1.3 PMx(PECVD) Chamber RF Generator ……………… 5-34 5.4.2.1.4 PMx(PECVD) Chamber RF Matcher ………………… 5-35 5.4.2.1.5 PMx(PECVD) Chamber Chuck Heater ……………… 5-36 5.4.2.1.6 PMx(PECVD) Chamber Wall Heater ………………… 5-38 5.4.2.1.7 PMx(PECVD) Chamber Mode/State/Idle …………… 5-39 5.4.2.1.8 PMx(PECVD) Chamber RPSC ………………………… 5-39 5.4.2.1.9 PMx(PECVD) Chamber Main Count Data…………… 5-40 5.4.2.1.10 PMx(PECVD) Chamber Process Ready Check List 5-41 5.4.2.1.11 PMx(PECVD) Chamber Auto function Command… 5-44 5.4.2.1.12 PMx(PECVD) Chamber Line2, DV-00 ……………… 5-56 5.4.2.1.13 PMx(PECVD) Chamber FRV ………………………… 5-56 5.4.2.1.14 PMx(PECVD) Chamber SRV ………………………… 5-56 5.4.2.1.15 PMx(PECVD) Chamber Throttle Valve ……………… 5-57 5.4.2.1.16 PMx(PECVD) Chamber Dry Pump ………………… 5-58 5.4.2.1.17 PMx(PECVD) Chamber Others ……………………… 5-59 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 6 - 5.4.2.2 PMx(PECVD) Gas ……………………………………………… 5-60 5.4.2.2.1 PMx(PECVD) Gas UV-##……………………………… 5-61 5.4.2.2.2 PMx(PECVD) Gas PV-##……………………………… 5-61 5.4.2.2.3 PMx(PECVD) Gas DV-##……………………………… 5-61 5.4.2.2.4 PMx(PECVD) Gas DV-00,LINE01,LINE02…………… 5-62 5.4.2.2.5 PMx(PECVD) Gas MFC## …………………………… 5-62 5.4.2.2.6 PMx(PECVD) Gas Process Data ……………………… 5-63 5.4.2.3 PMx(PECVD) P/M Items List ………………………………… 5-64 5.4.2.3.1 PMx(PECVD) P/M Items List By Depo. Thickness(A) 5-64 5.4.2.3.2 PMx(PECVD) P/M Items List By Process Count … 5-64 5.4.2.3.3 PMx(PECVD) P/M Items List Clean Count ………… 5-65 5.4.2.4 PMx(PECVD) I/O Monitor page ……………………………… 5-66 5.4.3 System Screen PMx (MOCVD) …………………………………… 5-69 5.4.3.1 PMx(MOCVD) Chamber ……………………………………… 5-69 5.4.3.1.1 PMx(MOCVD) Chamber Process Status …………… 5-69 5.4.3.1.2 PMx(MOCVD) Chamber Chuck U/D Motor ………… 5-70 5.4.3.1.3 PMx(MOCVD) Chamber Chuck Heater ……………… 5-72 5.4.3.1.4 PMx(MOCVD) Chamber Wall Heater ………………… 5-73 5.4.3.1.5 PMx(MOCVD) Chamber Heat Exchanger …………… 5-74 5.4.3.1.6 PMx(MOCVD) Chamber Mode/Status/Idle………… 5-75 5.4.3.1.7 PMx(MOCVD) Chamber Main Count Data…………… 5-76 5.4.3.1.8 PMx(MOCVD) Chamber Process ready Check List… 5-76 5.4.3.1.9 PMx(MOCVD) Chamber Auto Function Commands 5-79 5.4.3.1.10 PMx(MOCVD) Chamber Line2, DV-00 …………… 5-92 5.4.3.1.11 PMx(MOCVD) Chamber FRV ………………………… 5-92 5.4.3.1.12 PMx(MOCVD) Chamber SRV ………………………… 5-92 5.4.3.1.13 PMx(MOCVD) Chamber Throttle Valve …………… 5-93 5.4.3.1.14 PMx(MOCVD) Chamber Dry Pump ………………… 5-94 5.4.3.1.15 PMx(MOCVD) Chamber Others ……………………… 5-95 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 7 - 5.4.3.2 PMx(MOCVD) Gas ……………………………………………… 5-96 5.4.3.2.1 PMx(MOCVD) Gas UV-##…………………………… 5-97 5.4.3.2.2 PMx(MOCVD) Gas PV-##……………………………… 5-97 5.4.3.2.3 PMx(MOCVD) Gas DV-##…………………………… 5-97 5.4.3.2.4 PMx(MOCVD) Gas AV-##……………………………… 5-98 5.4.3.2.5 PMx(MOCVD) Gas MFC-##…………………………… 5-98 5.4.3.2.6 PMx(MOCVD) Gas Process Data …………………… 5-99 5.4.3.2.7 PMx(MOCVD) Gas Source Tank ……………………… 5-99 5.4.3.3 PMx(MOCVD) P/M Items List ………………………………… 5-100 5.4.3.3.1 PMx(MOCVD) P/M Items List By Depo. Thickness 5-100 5.4.3.3.2 PMx(MOCVD)P/M Items ListBy Process Count Table 5-101 5.4.3.3.3 PMx(MOCVD)P/M Items ListClean Count Table …… 5-101 5.4.3.4 PMx(MOCVD) I/O Monitor page ……………………………… 5-102 5.5 Recipe Screen …………………………………………………………………… 5-105 5.5.1 Recipe Route ………………………………………………………… 5-105 5.5.1.1 Recipe Route File Control Panel ………………………… 5-106 5.5.1.2 Recipe Route Data Control Panel ………………………… 5-107 5.5.2 Recipe TMC (Heat Recipe) ………………………………………… 5-108 5.5.2.1 Recipe TMC File Control Panel …………………………… 5-109 5.5.3 Recipe PMx (PECVD) ……………………………………………… 5-110 5.5.3.1 Recipe PMx (PECVD) Others ……………………………… 5-110 5.5.3.2 Recipe PMx (PECVD) Step Sub Loop …………………… 5-111 5.5.3.3 Recipe PMx (PECVD) ………………………………………… 5-112 5.5.3.4 Recipe PMx (PECVD) Recipe Factor ……………………… 5-112 5.5.4 Recipe PMx (MOCVD) ……………………………………………… 5-114 5.5.4.1 Recipe PMx (MOCVD) Process Others ………………… 5-114 5.5.4.2 Recipe PMx (MOCVD) Process Step Sub Loop ……… 5-115 5.5.4.3 Recipe PMx (MOCVD) Process …………………………… 5-116 5.5.4.4 Recipe PMx (MOCVD) Recipe Factor …………………… 5-116 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 8 - 5.5.4.5 Recipe PMx (MOCVD) ALD Others …………………… 5-117 5.5.4.6 Recipe PMx (MOCVD) ALD Sub Loop ………………… 5-118 5.5.4.7 Recipe PMx (MOCVD) ALD Data Table Factor ……… 5-118 5.5.4.8 Recipe PMx (MOCVD) ALD Gas Panel Factor ……… 5-119 5.6 Data Log Screen ………………………………………………………………… 5-120 5.6.1 Data Log Event ……………………………………………………… 5-120 5.6.2 Data Log Job ………………………………………………………… 5-122 5.6.3 Data Log Process …………………………………………………… 5-123 5.6.3.1 Data Log Process Data Table ……………………………… 5-123 5.6.3.1.1 Data Log Process Set Log Items ……………………… 5-124 5.6.3.2 Data Log Process Plot Chart ……………………………… 5-126 5.6.3.2.1 Data Log Process Set Plot Items ……………………… 5-127 5.7 Setup Screen …………………………………………………………………… 5-130 5.7.1 Setup User …………………………………………………………… 5-130 5.7.2 Setup CTC …………………………………………………………… 5-131 5.7.3 Setup TMC …………………………………………………………… 5-133 5.7.3.1 Setup TMC Vacuum ………………………………………… 5-133 5.7.3.2 Setup TMC General ………………………………………… 5-134 5.7.3.3 Setup TMC Heater …………………………………………… 5-135 5.7.4 Setup PMx(PECVD) ………………………………………………… 5-137 5.7.4.1 Setup PMx(PECVD) Gas …………………………………… 5-137 5.7.4.2 Setup PMx(PECVD) Vacuum ……………………………… 5-138 5.7.4.3 Setup PMx(PECVD) System I …………………………… 5-140 5.7.4.4 Setup PMx(PECVD) System II …………………………… 5-141 5.7.4.5 Setup PMx(PECVD) Heater ……………………………… 5-143 5.7.5 Setup PMx(MOCVD) ………………………………………………… 5-144 5.7.5.1 Setup PMx(MOCVD) Gas ………………………………… 5-144 5.7.5.2 Setup PMx(MOCVD) Vacuum …………………………… 5-146 5.7.5.3 Setup PMx(MOCVD) System I …………………………… 5-147 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 9 - 5.7.5.4 Setup PMx(MOCVD) System II …………………………… 5-148 5.7.5.5 Setup PMx(MOCVD) System III …………………………… 5-150 5.7.5.6 Setup PMx(MOCVD) System IV …………………………… 5-151 5.8. Alarms Screen …………………………………………………………………… 5-152 VI. Maintenance 6.1 Preparation and Restoration …………………………………………………… 6-2 6.1.1 Chamber Back up Procedure …………………………………………… 6-2 6.1.2 Chamber Cooling Down Procedure before start Vent ……………… 6-4 6.1.3 Chamber Pump Down …………………………………………………… 6-5 6.1.4 Chamber venting …………………………………………………………… 6-8 6.1.5 Non-Toxic Gas의 Cycle Purge ………………………………………… 6-12 6.1.6 Toxic Gas Cycle Purge …………………………………………………… 6-13 6.1.7 MFC Purge ………………………………………………………………… 6-14 6.1.8 MFC Replacement Procedure …………………………………………… 6-15 6.1.9 Gas leak test on Gas cabinet pipe ……………………………………… 6-16 6.2 Maintenance ……………………………………………………………………… 6-17 6.2.1 Showerhead ………………………………………………………………… 6-17 6.2.1.1 Removing the Showerhead ………………………………………… 6-17 6.2.1.2 Setting the Showerhead ……………………………………………… 6-21 6.2.1.3 Check List during removing procedure of the Showerhead …… 6-24 6.2.1.4 Check List when installing the Showerhead ……………………… 6-25 6.2.2 Susceptor …………………………………………………………………… 6-26 6.2.3 RF Generator Replacement Procedure ………………………………… 6-31 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 10 - 6.2.4 RF Matcher Replacement Procedure …………………………………… 6-34 6.2.5 RF Test Procedure ………………………………………………………… 6-37 6.2.6 RF Replacement Procedure ……………………………………………… 6-42 6.2.7 MOCVD JACKET Replacement Procedure …………………………… 6-44 6.2.8 Pre heat chamber Lamp heater assembly Procedure ……………… 6-48 6.2.9 Servo motor Replacement Procedure ………………………………… 6-50 6.2.10 VAT Throttle Valve Calibration Procedure …………………………… 6-52 6.2.11 IPC Replacement Procedure …………………………………………… 6-63 6.2.12 System S/W Work Procedure ………………………………………… 6-76 6.2.13 Patch Work Procedure of System S/W ……………………………… 6-81 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-1 I. 安全 (Safety) 本章提供 Solar Cell system的安全指南事项. 有关Solar Cell的动作或维护的所有作业者必须 熟知本章明示的安全注意事项. Notes: 为了安全,本装备必须由(株)JUSUNG ENGINEERING的工程师或从JUSUNG ENGINEERING学习装备专业 教育课程 且 得到教育认证的人来安装. 要移动装备或安装或重新安排则需联系 ( 株 ) JUSUNG ENGINEERING委任给(株)JUSUNG ENGINEERING技术者. 不要在没有JUSUNG技术者的帮助下无理作业. 装备没有正常安装时，会漏出到火灾、爆炸、机械性、电气性危险. 注意: 任意改造装备或解除、无视Interlock而使用装备时会暴露在有伤害危险的环境中严重时会有生命 危险. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-2 主要安全徽标的定义 危 险 不躲避会发生深刻伤害甚至死亡的危险状 况. ! 注 意 若不注意不太危险，但会发生引起造成 装备的损伤或给人体造成伤害的潜在的危 险状况.对特定作业要注意进行. NOTICE 通知适当的安全状况或显示对安 全作业的一般性指示 警 告 显示不躲避会造成深刻的伤害的潜在的危 险状况. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-3 1.1 装备安全危险警告(Safety Hazard Alert) 一般性警告 引火性物质 毒性物质 高压电流 高温注意 爆炸危险 夹(手) 激光光线注意 RF危险 齿轮(咬合) 降落危险 坠楼危险 腐蚀性物质 冲撞危险 重量物使用注意 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-4 Safety Marks and Description 警 告 齿轮咬合 动弹的配件漏出. 手等会被夹到动弹的部位 受伤害. 警 告 沉重的物体 沉重的配件，为了躲避肌肉或腰的伤害，请 利用恰当的技术或Lift Tool，两个人以上一起 作业. 警 告 激光光线注意 超出规定时间长时间在没有保护装备的情况 下看Laser Beam . 这会产生永久性的视力损 伤. 警 告 爆炸物 资源Gas或残留物，焊接气体等引起爆炸会 引起严重伤害或死亡. 执行作业