JUSUNG PECVD 设备说明(1)

Safety Manual CYCLONE TM PLUS JUSUNG Engineering Co., Ltd. Page Revision 1.0 1-1 User’s ManualPreliminary World’s Best People, World’s Best Products, World’s Best Company Solar Cell System User’s Manual In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 1 - Contents I. Safety 1.1 Safety Hazard Alert 1-3 1.2 Factors with safety caution 1-7 1.3 Guidance to the safety of the system 1-8 1.4 Emergency OffEMO 1-10 1.5 Mechanical Hazards 1-12 1.6 Electric Hazards 1-19 1.7 Gas Hazards 1-21 1.8 Thermal Hazard 1-33 1.9 Fire and Explosion Hazards 1-36 1.10 Laser Hazards 1-41 1.11 Vacuum Hazards 1-42 1.12 Environmental Hazards 1-44 1.13 RF Hazard 1-45 1.14 Other Danger 1-46 1.15 Guide in Accident by High-pressure Gas 1-48 1.16 Guid in Accident by Gas poisoning 1-50 1.17 Ventilation of Gas Cabinet 1-51 1.18 Gas handing with safety caution 1-53 1.19 Lockout/Tagout procedure 1-54 1.20 Types and Location of Interlocks 1-57 1.21 Safety label location 1-62 1.22 Specialty Gas Material Safety Data Sheet 1-66 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 2 - II. Functional Description 2.1 System Overview 2-1 2.2 Hardware Specification 2-2 2.3 Transfer Chamber 2-3 2.4 Load Lock Chamber 2-6 2.5 Pre heat Chamber 2-7 2.6 Load lock pre heat chamber 2-8 2.7 PECVD Single Substrate Process Chamber 2-10 2.8 MOCVD Single Substrate Process Chamber 2-13 2.9 Gas Rack Gas Delivery System 2-15 2.10 Chamber Cooling System 2-37 2.11 Vacuum System 2-42 2.12 Heater System 2-50 2.13 RF Plasma System 2-53 III. Installatoin 3.1 Site Requirement 3-2 3.2 Floor Space and Loading 3-2 3.3 Site Requirements for Moving the system 3-2 3.4 Initial Inspection 3-2 3.5 Environments 3-3 3.6 Inspection prior to executing Power-on 3-4 3.7 Power-On execution procedure 3-5 3.8 Power-Off procedure 3-6 3.9 Ventilating Gas Cabinet 3-6 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 3 - 3.10 Packing and transporting 3-7 3.11 System Trun Off Procedure 3-7 3.12 System Trun On Procedure 3-8 3.13 Abnormal operation of Process or Transfer Chamber 3-9 3.14 Emergency Off EMO 3-10 IV. Facility Requirements 4.1 System Overview 4-2 4.2 Electrical Power Diagram 4-4 4.3 GN2 Facility Requirement 4-10 4.4 CDA Facility Requirement 4-16 4.5 PCW Facility Requirement 4-19 4.6 City Water Facility Requirement 4-22 4.7 DrainAcid Facility Requirement 4-24 4.8 General Exhaust Facility Requirement 4-26 4.9 Toxic Exhaust Facility Requirement 4-28 4.10 Pumping Line Facility Requirement 4-31 4.11 Specialty Gas Facility Requirement 4-34 4.12 DI Water Facility Requirement 4-39 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 4 - V. Operation 5.1. GUI Graphic User Interface 5-2 5.1.1. Structure of GUI 5-2 5.1.2. The Layout Screen of GUI 5-3 5.1.2.1 PC Screen Map 5-3 5.1.2.2 Top Panel 5-4 5.1.2.3 Bottom Panel 5-4 5.1.3. Log Off Screen 5-5 5.2 Easy Screen 5-6 5.2.1 Easy Screen Jobs 5-6 5.2.2 Easy Screen TM/LL/HT Chamber Popup 5-8 5.2.3 Easy Screen PMx Chamber Popup 5-10 5.3 Jobs Screen 5-12 5.3.1 Jobs Screen Main 5-12 5.3.2 Jobs Screen Process Module’s System Status 5-14 5.3.3 Jobs Screen Transter Module’s System Status 5-14 5.3.4 Jobs Screen Heat Chamber System Status 5-15 5.3.5 Jobs Screen Load-lock System Status 5-15 5.3.6 Jobs Screen PIO System Status 5-16 5.3.6.1 PIO System Screen PIO Status Popup 5-17 5.4 System Screen 5-19 5.4.1 System Screen TMC 5-19 5.4.1.1 TMC System Control 5-19 5.4.1.1.1 TMC System Control Vacuum System 5-20 5.4.1.1.2 TMC System Control TM System Status 5-20 5.4.1.1.3 TMC System Control Heat Chamber System Status 5-21 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 5 - 5.4.1.1.4 TMCSystem ControlProcess Module System Status 5-21 5.4.1.1.5 TMCSystem ControlLoad-lock System Status 5-22 5.4.1.1.6 TMCSystem ControlLoad-lock Command Panel 5-23 5.4.1.1.7 TMCSystem ControlHeat Chamber Command Panel 5-24 5.4.1.1.8 TMCSystem ControlLamp Heater Popup 5-25 5.4.1.1.9 TMCSystem ControlTMVac.Robot Command Panel 5-26 5.4.1.1.10 TMCSystem ControlVac.Robot Popup 5-27 5.4.1.1.11 TMCSystem ControlTM Transfer Popup 5-28 5.4.1.2 TMC Glass Synchronize 5-29 5.4.1.3 TMC I/O Monitor 5-30 5.4.2 System Screen PMx PECVD 5-31 5.4.2.1 PMxPECVD Chamber 5-31 5.4.2.1.1 PMxPECVD Chamber Process Status 5-31 5.4.2.1.2 PMxPECVD Chamber Chuck U/D Motor 5-32 5.4.2.1.3 PMxPECVD Chamber RF Generator 5-34 5.4.2.1.4 PMxPECVD Chamber RF Matcher 5-35 5.4.2.1.5 PMxPECVD Chamber Chuck Heater 5-36 5.4.2.1.6 PMxPECVD Chamber Wall Heater 5-38 5.4.2.1.7 PMxPECVD Chamber Mode/State/Idle 5-39 5.4.2.1.8 PMxPECVD Chamber RPSC 5-39 5.4.2.1.9 PMxPECVD Chamber Main Count Data 5-40 5.4.2.1.10 PMxPECVD Chamber Process Ready Check List 5-41 5.4.2.1.11 PMxPECVD Chamber Auto function Command 5-44 5.4.2.1.12 PMxPECVD Chamber Line2, DV-00 5-56 5.4.2.1.13 PMxPECVD Chamber FRV 5-56 5.4.2.1.14 PMxPECVD Chamber SRV 5-56 5.4.2.1.15 PMxPECVD Chamber Throttle Valve 5-57 5.4.2.1.16 PMxPECVD Chamber Dry Pump 5-58 5.4.2.1.17 PMxPECVD Chamber Others 5-59 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 6 - 5.4.2.2 PMxPECVD Gas 5-60 5.4.2.2.1 PMxPECVD Gas UV- 5-61 5.4.2.2.2 PMxPECVD Gas PV- 5-61 5.4.2.2.3 PMxPECVD Gas DV- 5-61 5.4.2.2.4 PMxPECVD Gas DV-00,LINE01,LINE02 5-62 5.4.2.2.5 PMxPECVD Gas MFC 5-62 5.4.2.2.6 PMxPECVD Gas Process Data 5-63 5.4.2.3 PMxPECVD P/M Items List 5-64 5.4.2.3.1 PMxPECVD P/M Items List By Depo. ThicknessA 5-64 5.4.2.3.2 PMxPECVD P/M Items List By Process Count 5-64 5.4.2.3.3 PMxPECVD P/M Items List Clean Count 5-65 5.4.2.4 PMxPECVD I/O Monitor page 5-66 5.4.3 System Screen PMx MOCVD 5-69 5.4.3.1 PMxMOCVD Chamber 5-69 5.4.3.1.1 PMxMOCVD Chamber Process Status 5-69 5.4.3.1.2 PMxMOCVD Chamber Chuck U/D Motor 5-70 5.4.3.1.3 PMxMOCVD Chamber Chuck Heater 5-72 5.4.3.1.4 PMxMOCVD Chamber Wall Heater 5-73 5.4.3.1.5 PMxMOCVD Chamber Heat Exchanger 5-74 5.4.3.1.6 PMxMOCVD Chamber Mode/Status/Idle 5-75 5.4.3.1.7 PMxMOCVD Chamber Main Count Data 5-76 5.4.3.1.8 PMxMOCVD Chamber Process ready Check List 5-76 5.4.3.1.9 PMxMOCVD Chamber Auto Function Commands 5-79 5.4.3.1.10 PMxMOCVD Chamber Line2, DV-00 5-92 5.4.3.1.11 PMxMOCVD Chamber FRV 5-92 5.4.3.1.12 PMxMOCVD Chamber SRV 5-92 5.4.3.1.13 PMxMOCVD Chamber Throttle Valve 5-93 5.4.3.1.14 PMxMOCVD Chamber Dry Pump 5-94 5.4.3.1.15 PMxMOCVD Chamber Others 5-95 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 7 - 5.4.3.2 PMxMOCVD Gas 5-96 5.4.3.2.1 PMxMOCVD Gas UV- 5-97 5.4.3.2.2 PMxMOCVD Gas PV- 5-97 5.4.3.2.3 PMxMOCVD Gas DV- 5-97 5.4.3.2.4 PMxMOCVD Gas AV- 5-98 5.4.3.2.5 PMxMOCVD Gas MFC- 5-98 5.4.3.2.6 PMxMOCVD Gas Process Data 5-99 5.4.3.2.7 PMxMOCVD Gas Source Tank 5-99 5.4.3.3 PMxMOCVD P/M Items List 5-100 5.4.3.3.1 PMxMOCVD P/M Items List By Depo. Thickness 5-100 5.4.3.3.2 PMxMOCVDP/M Items ListBy Process Count Table 5-101 5.4.3.3.3 PMxMOCVDP/M Items ListClean Count Table 5-101 5.4.3.4 PMxMOCVD I/O Monitor page 5-102 5.5 Recipe Screen 5-105 5.5.1 Recipe Route 5-105 5.5.1.1 Recipe Route File Control Panel 5-106 5.5.1.2 Recipe Route Data Control Panel 5-107 5.5.2 Recipe TMC Heat Recipe 5-108 5.5.2.1 Recipe TMC File Control Panel 5-109 5.5.3 Recipe PMx PECVD 5-110 5.5.3.1 Recipe PMx PECVD Others 5-110 5.5.3.2 Recipe PMx PECVD Step Sub Loop 5-111 5.5.3.3 Recipe PMx PECVD 5-112 5.5.3.4 Recipe PMx PECVD Recipe Factor 5-112 5.5.4 Recipe PMx MOCVD 5-114 5.5.4.1 Recipe PMx MOCVD Process Others 5-114 5.5.4.2 Recipe PMx MOCVD Process Step Sub Loop 5-115 5.5.4.3 Recipe PMx MOCVD Process 5-116 5.5.4.4 Recipe PMx MOCVD Recipe Factor 5-116 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 8 - 5.5.4.5 Recipe PMx MOCVD ALD Others 5-117 5.5.4.6 Recipe PMx MOCVD ALD Sub Loop 5-118 5.5.4.7 Recipe PMx MOCVD ALD Data Table Factor 5-118 5.5.4.8 Recipe PMx MOCVD ALD Gas Panel Factor 5-119 5.6 Data Log Screen 5-120 5.6.1 Data Log Event 5-120 5.6.2 Data Log Job 5-122 5.6.3 Data Log Process 5-123 5.6.3.1 Data Log Process Data Table 5-123 5.6.3.1.1 Data Log Process Set Log Items 5-124 5.6.3.2 Data Log Process Plot Chart 5-126 5.6.3.2.1 Data Log Process Set Plot Items 5-127 5.7 Setup Screen 5-130 5.7.1 Setup User 5-130 5.7.2 Setup CTC 5-131 5.7.3 Setup TMC 5-133 5.7.3.1 Setup TMC Vacuum 5-133 5.7.3.2 Setup TMC General 5-134 5.7.3.3 Setup TMC Heater 5-135 5.7.4 Setup PMxPECVD 5-137 5.7.4.1 Setup PMxPECVD Gas 5-137 5.7.4.2 Setup PMxPECVD Vacuum 5-138 5.7.4.3 Setup PMxPECVD System I 5-140 5.7.4.4 Setup PMxPECVD System II 5-141 5.7.4.5 Setup PMxPECVD Heater 5-143 5.7.5 Setup PMxMOCVD 5-144 5.7.5.1 Setup PMxMOCVD Gas 5-144 5.7.5.2 Setup PMxMOCVD Vacuum 5-146 5.7.5.3 Setup PMxMOCVD System I 5-147 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 9 - 5.7.5.4 Setup PMxMOCVD System II 5-148 5.7.5.5 Setup PMxMOCVD System III 5-150 5.7.5.6 Setup PMxMOCVD System IV 5-151 5.8. Alarms Screen 5-152 VI. Maintenance 6.1 Preparation and Restoration 6-2 6.1.1 Chamber Back up Procedure 6-2 6.1.2 Chamber Cooling Down Procedure before start Vent 6-4 6.1.3 Chamber Pump Down 6-5 6.1.4 Chamber venting 6-8 6.1.5 Non-Toxic Gas의 Cycle Purge 6-12 6.1.6 Toxic Gas Cycle Purge 6-13 6.1.7 MFC Purge 6-14 6.1.8 MFC Replacement Procedure 6-15 6.1.9 Gas leak test on Gas cabinet pipe 6-16 6.2 Maintenance 6-17 6.2.1 Showerhead 6-17 6.2.1.1 Removing the Showerhead 6-17 6.2.1.2 Setting the Showerhead 6-21 6.2.1.3 Check List during removing procedure of the Showerhead 6-24 6.2.1.4 Check List when installing the Showerhead 6-25 6.2.2 Susceptor 6-26 6.2.3 RF Generator Replacement Procedure 6-31 In d ex S OU L T E RA JUSUNG ENGINEERING Co., Ltd. Page Revision 1.0 - 10 - 6.2.4 RF Matcher Replacement Procedure 6-34 6.2.5 RF Test Procedure 6-37 6.2.6 RF Replacement Procedure 6-42 6.2.7 MOCVD JACKET Replacement Procedure 6-44 6.2.8 Pre heat chamber Lamp heater assembly Procedure 6-48 6.2.9 Servo motor Replacement Procedure 6-50 6.2.10 VAT Throttle Valve Calibration Procedure 6-52 6.2.11 IPC Replacement Procedure 6-63 6.2.12 System S/W Work Procedure 6-76 6.2.13 Patch Work Procedure of System S/W 6-81 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-1 I. 安全 Safety 本章提供 Solar Cell system的安全指南事项. 有关Solar Cell的动作或维护的所有作业者必须 熟知本章明示的安全注意事项. Notes 为了安全,本装备必须由株JUSUNG ENGINEERING的工程师或从JUSUNG ENGINEERING学习装备专业 教育课程 且 得到教育认证的人来安装. 要移动装备或安装或重新安排则需联系 株 JUSUNG ENGINEERING委任给株JUSUNG ENGINEERING技术者. 不要在没有JUSUNG技术者的帮助下无理作业. 装备没有正常安装时，会漏出到火灾、爆炸、机械性、电气性危险. 注意 任意改造装备或解除、无视Interlock而使用装备时会暴露在有伤害危险的环境中严重时会有生命 危险. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-2 主要安全徽标的定义 危 险 不躲避会发生深刻伤害甚至死亡的危险状 况. 注 意 若不注意不太危险，但会发生引起造成 装备的损伤或给人体造成伤害的潜在的危 险状况.对特定作业要注意进行. NOTICE 通知适当的安全状况或显示对安 全作业的一般性指示 警 告 显示不躲避会造成深刻的伤害的潜在的危 险状况. Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-3 1.1 装备安全危险警告Safety Hazard Alert 一般性警告 引火性物质 毒性物质 高压电流 高温注意 爆炸危险 夹手 激光光线注意 RF危险 齿轮咬合 降落危险 坠楼危险 腐蚀性物质 冲撞危险 重量物使用注意 Safety Manual Solar Cell System JUSUNG Engineering Co., Ltd. Page Revision 0.0 1-4 Safety Marks and Description 警 告 齿轮咬合 动弹的配件漏出. 手等会被夹到动弹的部位 受伤害. 警 告 沉重的物体 沉重的配件，为了躲避肌肉或腰的伤害，请 利用恰当的技术或Lift Tool，两个人以上一起 作业. 警 告 激光光线注意 超出规定时间长时间在没有保护装备的情况 下看Laser Beam . 这会产生永久性的视力损 伤. 警 告 爆炸物 资源Gas或残留物，焊接气体等引起爆炸会 引起严重伤害或死亡. 执行作业