分析晶体硅太阳电池前电极形成机理

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Fo ur types of interface st ruct ures of nisms are co ncluded to be two2step and multi2step t unneling p rocess f ro m emitter to t he silver t hrough glass layers. Key words 銆€銆€ solar cell , f ront co ntact , sinter , Ag2Si co ntact sanisms of Ag2Si contact s and t he current t ranspo rt mechanisms are still not well understood. The sintering p rocess of鎺ヨЕ褰㈡垚 虹⁄浠¥強鐢垫祦¥犺緭 哄 , 瑰墠鐢垫瀬鐑х粨宸ヨƒ浠¥強 Ag2Si 鎺ヨЕ鐨勫舰鎴愭満鐞嗚繘琛屼簡鍒嗘瀽 ,§˝currency1浜�4 绉�Ag2Si “潰 鐨勬 «舰‹ 銆傛›fifl¡鍚Ø殑 �“潰鎺ヨЕ褰㈠ ,鎸–currency1涓† ‡ ч· 堝 ¶ 姝•‚„”» „數 …‰ ”満鍒¨槸 €涓昏 鐨� �勭數 …‰ ”柟 ‹忋€�澶 槼鐢垫睜 銆€ 鍓嶇數鏋 銆€ 鐑 х粨 銆€ 2Si 鎺ヨЕ Ag 鍏 ¿ 銆€銆€�Ag2Si contact s are p resented. According to different types of interface struct ures , t he main current t ransport mecha2screen p rinting technique to form t he silver f ro nt contact s and aluminium rear contact s. However , t he fo rmation mech2`´ 銆€銆€ ˆ˜墠 傚満涓� �85 %浠 鐨勬 浣撶 澶槼鐢垫睜 囩 涓 ł øœ € ¯�澶–墠 銆 `Ø數鏋 銆備 浜嗕簡 ˘墠鐢垫瀬鐨� � �Ag2SiAnalysis of the Formation Mechanisms of Front Contacts of Crystalline Si Solar CellsL I J unyo ng , L IAN G Zo ngcun , ZHAO Ruqiang , J IN J ingsheng , S H EN HuiAbstract 銆€銆€ p resent , mo re t han 85 % of t he crystalline Si solar cells in t he world market are p roduced using At鏅 纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚 虹⁄鍒嗘瀽 3‡ �,˙佸¨瀛�, 垫˚‹�, ¸ �,£ 銆€ � �1銆€ 瀹為獙�,鍏¨˝ 鐨勫˛ ˇ 鐑� х粨—ø€¶俯 銆傜儳˜撳 ¶俯 浣� �, 鍒欐 闈 數鏋…¡`´ 閫�SiN x 鑶�, 涓 鐢 樆杩– ,琛ㄩ潰 H 鍘 瀛愭 浣撳 鐨勬 Æ¡�澶�, 涓 currency1»閽 寲浣撳 缂洪櫡 ; ªØ儳˜ —ø€¶俯 楂� �,Ag 鐢垫瀬¥ 閫�n + 灞傚 勫 , 涓�p Ł 琛Ø 鎺ヨ� Е ,褰㈡垚Œº 烘 粨  , 浣 殑…惰 鐢 樆 岃澶х殑鍙嶅悜 æ忕數 �,闄嶄 澶 槼鐢垫睜 ı 銆  囩 鐢 樆鐜 1 锝�3ł ? 銆�00 ] 鍚ø殑 œ 纭 鍒fi 澶� �cm [ 闃崇數姹 銆傚お�闃崇數姹犵殑鐢ß 宸ヨƒ涓�: 鍘昏〃闈㈡ ¥ 鍙婂 澶囪〃闈 Æ瓧濉„粧闈� �; 娑叉€�POCl 3 鎵╂暎褰㈡垚 n + 灞�, 瑰潡鐢 樆涓�45 锝�+ 55ł/ sq ; 绛夌 瀛愪 鍒昏殌 紭 � n 灞�;鍘婚櫎纾¿ 鐜荤拑 � ; PECVD 闀€ SiN x 忓弽 勮啘 ,绾�75nm 鍘�; 鍒嗗埆 囩 涓 ł øœ宸ヨƒ鍒fi ` 鐢垫瀬 銆 `岃〃闈㈠満 � � � �Ag 姝ｇ數鏋�,Ag 嗘· 囩 鍟嗙 Ferro332 Al 462 —祮 �; 閾ß 鐑х粨鐐 竴 儳˜�, €楂樻俯 瀹氫  880 鈩冦€ «瘯 � I2V 鐗规€ 銆 囩 � � Quanta 400 F E G 哄 勬壂§忕數瀛愭樉寰 暅  ( SEM) � �Si2Ag 鐢垫瀬 潰  ,…堕噰鐢�EDS ( Energy disper sive spect rom2 eter ,`介噺 叉暎璋变华) 鍒嗘瀽鍏¨垚鍒 銆� �鏅 纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚 虹⁄鍒嗘瀽/ ‡ 囩瓑9 ?浘 1 涓 偣  3 浣嶇疆 ,鐑х粨瀹Ø殑 Ag 鐢垫瀬 ¶惈 夎 澶 殑 Si , 存槑鐜 鐠 � � ��SiN x 鑵 铓€ 浣 鐢 銆� � � � �G. Schubert 绛塠 8 ] 閫 杩� �SEM/ EDS 鍒嗘瀽涔熷 鐜�, 鐑х粨鍚 幓鐠冩·涓 湁  Pb £currency1穩浜х敓 銆�B. Sopori 绛塠 4 ] 璁や , 娓╃儤…叉椂 ,嗘·涓�Ag 棰楃矑琚 皬鐗 鐘剁幓鐠冩·棰楃矑鍒嗙  ,ª¶湪 450 鈩�,鐜荤拑 欏紑 Ł啍鍖栧苟瑕嗙洊 鏃� �Ag 棰楃矑琛ㄩ潰 , �600 鈩�,Ag 棰楃矑琚 啍铻嶇殑鐜荤拑 欐 鍖呭洿 銆 鏃 ‡忕潃娓╁害鐨勫崌楂�, 褰�Ag 棰楃矑鍒嗗竷浜 啍铻嶇殑鐜荤拑 欎 鏃�, Ag 棰楃矑琛ㄩ潰涓 幓鐠冩·鍙ø敓绂诲瓙浜† , …fi湪 Ag 棰楃矑琛ㄩ潰褰㈡垚涓€ 灞�Ag2M2Si 娑叉€ 浉 ( M 涓虹幓鐠冩·涓 殑 Æ睘鍏冪礌 ) 銆傚 鐜荤拑 鐔旈€� �SiN x 灞傚悗 ,‹€ 嬩 纭�n + 鍙Æ皠鍖哄 鎺ヨЕ ,…剁户˜ 鐢熸哀鍖 杩ƒ師鍙嶅  ( ‹�( 1) ) 銆傜敓鎴愮殑 SiO2 ›惰В浜 幓鐠冩·涓�,Ag 棰楃矑 “潰澶勮仛闆� �, 杩滅 �Si 琛ㄩ潰鐨�Ag 棰楃矑涔¯浉浜掕仛闆嗘 «湪涓€ 銆�傚 ˚� �1 鎵€绀�,鐑х粨鍚�,Ag 棰楃矑闂村苟涓嶆槸褰㈡垚闈炲父绱у瘑鐨 ˜”瀯 � ,ª屾槸澶 瓟˜”瀯 ,鍙 互鍒†柇瀹為檯褰㈡垚  Ag2Si 鎺ヨЕ鐨�Ag 鎴 鍒嗗苟涓嶆槸 � Ag 棰楃矑 ,ª屾槸閫ı 绂诲瓙浜† ›惰В浜 幓鐠冩·涓 殑  Ag 鍘熷瓙 銆傚 ˚� �1 涓 偣  1 銆�4 鎵€绀�, ㄧ晫闈㈠ 瀛ƒ�湪 Ag 銆 銆� �, 鍙 鐐� �Pb Si 幓鐠冩·涓 鐗– 鐢ß簡鍙嶅 � , Ag ㄨ 澶勬矇娣€ 銆傜幓鐠冩·杩ƒ彲 浠 綔涓 竴闃绘尅灞傛潵 忓皯 Ag 鎵╂暎杩涘叆 n + 鍙Æ皠鍖哄拰 p2n ˜ 鍖篬 �9 ] ,浠庤€ 鍔 浜 ˜ 鍖 鏃 ˜ 鍚 æ 鐢 銆傛湁 ‚ ˙ 璁 涓篬 � � � � � � � � � � � � � � � � � � 10 ] ,濡傛灉£℃湁鐜荤拑 欎粙浜�Ag 棰楃矑涓 涔 棿 � , ㄧ儳˜撹 ˇ 渭 涓� �,Ag 鍘熷瓙鍙 互鎵╂暎鑷崇 � 5 m 娣卞 銆 鐑� � х粨—ø€¶俯 鍚庤繘琛¶揩閫熷喎 �,Ag 鐢垫瀬涓�Si 涔 闂磋 褰㈡垚澶 “潰鎺ヨ� � Е褰㈠ 銆傜幓鐠冩·涓 殑纭呭湪纭 涓婂 寤 嶇粨鏅  ,ª�Ag 鏅剁矑 ㄧ 鐗囪〃闈 鏋˝currency1涓旈殢鎰忓 銆傚湪閫傚 鐨勭儳˜”俯 Æ笅 � � � ,Ag 鏅剁矑鐨勭粨鏅剁敓闀 Si 澶栧欢 瑰悜涓€鑷碵 11 ,12 ] 銆 夌˘˙惰€呴€ı � T EM 鍒嗘瀽[ 13 ,14 ] 鍙ø , 噾瀛˝ 褰 鐨� �Ag 鏅 绮 敓闀 繘鍏¥fl � n + 鍙Æ皠鍖哄 �, 鍙湁 犵 绫冲 �, ª屾湁浜 鍒欐湁 犵 绾崇 澶� у皬 , 涓 繖绫绘矇娣€ ㄧ晫闈㈠ 鍒嗗竷£℃�湁 勫 , 涓€ 涓哄€ 噾瀛 琛ㄩ潰灞 Ł {111} 鏅堕潰 銆傚 闄 ,Ag 鏅剁矑杩涘叆 鍙Æ皠鏋佸苟涓嶆槸ˆ存 涓�Si 鎺ヨЕ[ 15 ] , �Ag 涓�Si 涔 棿杩ƒ ㄧ害 5nm 鐨勭幓鐠冩·灞 銆傚浘 � 1 涓 偣  2 浣嶇疆涓昏 鏄� �Ag �Si 鍏冪礌 銆 ㄨ 鐐瑰 槸 � �Ag ˆ 矇娣€ 銆 g £currency1穩鍙 互杩涘叆  n + 鍖哄 ㄨ 130nm[ 12 ] 銆 鐢变Ł 栧§鏄 啍铻嶇幓鐠冩·�涓 �n + 鍙Æ皠鍖烘 �, ›惰В ㄧ幓 鐠冩·涓 殑  Ag ¥ 湪纭 〃闈㈡瀽 虹粨鏅¨“杩涘叆 n + 鍙Æ皠鍖虹粨鏅�, ˚ 姝 浜 舰鎴愮殑 “潰 瀛ƒ湪浠 笅 犵 褰㈠ � � : ( 1 ) 澶�Ag 棰楃矑/ 勫 鐜荤拑 �( 0 锝�20nm ) / Ag 鏅剁矑/ 勫 鐜荤拑 �( 5nm 宸« ) / Si ; ( 2 ) 澶�Ag 棰楃矑/ ›惰В浜�Ag 鍘熷瓙鐨勫 鐜荤拑 欏 / Si ; ( 3 ) 澶�Ag 棰楃矑/›惰В浜�Ag 鍘熷瓙鐨勫 鐜荤拑 欏 / Ag 鏅剁矑/ 勫 鐜荤拑 �Si ,ª¶湪姝 鎺ヨЕ褰㈠涓�,鍘 殑鐜荤拑 欏 涓 湪闈犺  Si 鍙Æ皠 鏋 殑涓€ т細瀛ƒ湪涓€浜 棤 Ag 绮¡瓙鐨勫�( 姝˘父鐑х粨¢呭£涓⁄皬 浜�20nm) [ 15 ] ,杩欎富瑕佹槸鐢变Ł 喎 磋 ˇ嬩 ,Ag 绮¡瓙杩囬¥ 屾瀽 哄苟 �Si 琛ㄩ潰 嶆ƒ˜” 鐢§currency1 , 娑 €“簡鐜荤拑 欎 鐨�Ag 绮¡瓙 ;( 4 ) 夌˘˙惰€ 繕鍙ø [ 15 ] , «Ł‹鐨�SiN x 鑶滀›¥ currency1鐜ø湪 愪 鍖 � �,鐗瑰埆鏄 湪 œ 纭呴噾瀛 ˜ 潰˜”瀯鐨勫  , 鐑х粨娓╁害fifl , «Ł‹鐨�SiN x 鑶 澶�,浠庤€“樆姝 簡鐜荤拑 欎 鐨� �Ag 鍚ø 涓–粨鏅 鐢§currency1 銆備¡鍚Ø晫闈 殑鎺ヨ� � Е褰㈠ 佸浘 2 銆 浠¡互涓婂 鏋˝彲†� �,鐜荤拑 欎 鐨勬哀鍖º 涓�Si 琛ㄩ潰鍙ø敓姘у寲 杩ƒ師鍙嶅 鐢熸垚 Pb ,Pb ›惰В浜 幓鐠冩·涓�, 瑰舰鎴愭 嗘 ‡鍒 2銆€ ˜”灉鍙婂 鏋�數姹犳·鎸囩數鏋佸拰涓绘·绾 柇闈¶繘琛�SEM 鍒嗘瀽 , 鍏剁粨鏋 濡傚浘 � 1 鎵€绀 銆傚� Ag2Si “潰涓嶅•浣嶇疆杩涜 �EDS 鍒嗘瀽 ,鍏fi‚鍏 绱犲惈 忓湪琛� �1 涓 „” 銆 琛  1 銆€EDS 鍒嗘瀽˚�1 涓 ‚鐐规垚鍒嗗惈 »„” ˚  1 ( a) 鐐 鐐� �Table 1 銆€EDS analysis result s of t he point s in Fig. 1鎴˝ Si% ( 鍘熷瓙鍒嗘…) Ag Pb鐐�鐐�˚�1 ( b) 鐐�12. 71 52. 56 0. 79 33. 9442. 29 10. 59 2. 30 44. 8250. 83 0. 52 07. 85 023. 58 7. 96 0. 6942. 33 49. 82鍏fi‰48. 6567. 77¿ 瀹`€ 琛ㄧ´ «瘯杩囩ˆ涓˜currency1鐜扮殑 � � C 銆 绛currency1垚鍒� �O2. 1 銆€ 鐑х粨宸ヨƒ« 銆傜儳˜撶¯浣˘俯娓╁害涓€ Ø湪 � 400 鈩 浠¥ � , 涓 俯娓╁害涓  300 锝�700 鈩 楂�樻俯娓╁害涓�700锝�00 鈩冦€傚湪浣˘俯闃¨ , 嗘·涓 殑 currency1満 ›fi墏 屾湁 虹˙鍚堝墏琚¨鍙戞“琚 ˚鐑  ; 娓¸ «�, 鐜荤拑 欏紑 Ł啍鍖�,Ag 棰楃矑‹€ «仛鍚�; ㄩ珮娓¸ «�,Ag 銆 鍙˝幓鐠冩·鎴˝ � Si 鍙ø敓鍙嶅 , 褰㈡垚 Ag2Si 鎺ヨЕ ; 鍐峰˛鏃�, Ag 绮¡瓙 ㄧ 鐗囪〃闈 粨 鏅剁敓闀 銆ˇ珮娓¸—鍔ㄨ〃闈� � �H 鍘熷瓙鍚ø 鐗– 銆傚 闄呭湪� �纭 鐗 鍙ø敓鐨勫弽 旀俯 浣¡Ł鐑� х粨鐐夎瀹 殑娓╁害  , Kyunghae [5] Kim 绛 ‚„”�鍙ø ,Ag 涓�Si 鐨勫 闄呮˝浣冲弽 旀俯 Æ 605 鈩 杩滀 浜� �Ag2Si 鍏辨 鐐 殑娓╁害 835 鈩 杩欏彲`æ槸鐢变Ł鍙嶅 浣撶ˆ 涓˜惈 ˆ 垚鍒� � �( Ag 銆 銆 銆 绛 ª屼 鍚堥噾� � � �鐔„偣闄嶄 銆傚 姝�Si Pb Bi + €瑕 鍚 € n 灞傜殑鎵╂暎 撳害 銆 嗘·鎴˝ �銆 忓弽 勮啘鍘 害绛 稿 ˚犵礌‡ヨ 瀹 儳˜撶¯鍚勬俯鍖哄 闄 殑娓╁害 銆 鑵 殌˙ €� � � ��SiN x 鑶�, 浣�Ag 棰楃矑`¸ 涓 鍙Æ皠鍖哄 鐢¯數瀛 � � � 6 ] 銆傚湪 稿 Ø˚鐑уcurrency1満›fi墏鐗 川涔⁄悗 , 鐜荤拑 欏紑 Ł啍 鍖 € 娑Æ寲 屾 ª� �SiN x 琛ㄩ潰 ,˜ц€屾 �Ag 棰楃矑 岃 铓€鎺�SiN x 灞 銆傜幓鐠冩·鑵 殌 � SiN x 灞 ˇ⁄ 鐢¯殑姘у寲杩ƒ師鍙嶅 涓篬 7 ] : 銆€銆€銆€銆€x Si + 2MO x ,glass x SiO2 + 2M ‹ :M 涓虹幓鐠冩·涓殑 Æ睘鍏冪礌  ,涓昏 鏄� �Pb 銆�( 1)2. 2 銆€ 2Si 鎺ヨЕ鐨勫舰鎴愭満鐞�Ag˚ 銆€ 鐢垫睜Ł呮Ø鐢垫瀬� ( a) 屼富Ł 數鏋 �b) 鍓Œ潰鐨�SEM ˚ߺ Fig. 1 銆€ SEMcross2section image of Ag gridline( a) andAg busbar( b)Ł– 鐑х粨宸ヨƒ €瑕 粡杩 娓 銆 涓 俯 銆 楂樻俯 銆 鍐峰˛ � � � � 4 涓 鐜荤拑 欏湪 Ag2Si 鎺ヨЕ褰㈡垚杩囩ˆ涓 鎸 簡鍏 ¿鐨 綔鐢  , 瀹�10 ?‡愭· ¶• : ‚„”» 銆€�2009 …�7 �( 涓 ‰� �23 ¿ 7 �涓€瀹 殑浣滅 [ 16 ] 銆備 �Ag 鐨勭粨鏅剁敓闀 熷 ヨ繕 �Pb 绮¡瓙 鐨勭粨鏅剁敓闀�,濡傚浘 1 ( b ) 涓 偣  1 鎵€绀 銆 � b 鐨勬矇娣€ 虹⁄… ¡娓 æ� �,ˆ 墠杩樻病 夌浉鍏 •„ 銆� �2. 3 銆€ 鐢垫祦¥犺緭 哄 ˆ 墠  , 逛 Æ 鍒�Ag 鐢垫瀬鐨勭數 …‰ ”満鍒惰繕£℃湁寰 fl 寰堝 鐨勮В �, ㄧ晫闈㈠ 瀛ƒ湪澶 鎺ヨ� � Е褰㈠ ( 濡備 闈㈡ 鍒嗘瀽鐨�4 绉嶆 «舰‹�) 銆傛 ¯˘˙惰€17 ] 璁や 鐢垫祦¥犺緭鏄 粡杩囩洿鎺–殑  Ag2Si 鎺ヨЕª¶ 鐢¯殑 , 浣嗘槸閫ı 鍒嗘瀽鐑х粨杩囩ˆ涓 幓鐠冩·鐨勬祦 鍔 € у強鍏¨ �Ag ㄧ幓鐠冩·涓 瀽 虹殑˜” 璁や  , 鐜荤拑欏 瀛ƒ湪浜¡ı浣 殑 � Ag2Si 鎺ヨЕ涔 棿 , ˚犳 涓嶅 ㄧ洿鎺–殑  Ag2Si 鎺 銆傜� �幓鐠冩·涓€ 璁や 鏄 ˜ 缂 浣  , 鍏 鐢 闃荤 楂 � � � �109ł ? cm[ 12 ] 銆傜 浜 幓鐠冩·涓 ł簡  Ag 绮¡瓙 ,ˆ 墠鏅 ø璁 •閫ı ‡ „”» 旀潵¥犺緭鐢垫祦  [ 6 ,12 ,18] 銆�Ching2 His Lin 绛塠 15 ] 璁や 峰œ瀹氫綔鐢ㄧ殑鏄 €ı  Ag 鏅剁矑2 勭幓鐠冩·灞�Si “潰鐨勭數 …‰ 銆傜 浜˘ß绉嶆 «舰‹忕殑鐜荤拑 欏 闈炲父 � �( Ł 5nm ) , 涓 浠 垚涓虹數 …‰ 撶殑闃绘尅灞�, 鐢 瀛˝彲鐢 ‚„”» 旈€ı 銆 € �‰ 竴绉嶆 «舰‹  , 鐢变Ł n + 鍙Æ皠 鍖哄 銆 鏅剁矑 銆 棰楃矑涔 棿 æ槸ˆ 勭殑鐜� �荤拑 欏 鍙 涓  Ag Ag 鐢垫祦鏄 €ı 涓† ‡  ч· 堝 ¥犺緭鐨 銆 €¶ 浜 浜 銆 涓� � �夌 鎺ヨ� Е褰 ‹� �,鍘 殑鐜荤拑 欎 ›惰В鐨勯噾灞炵矑瀛愪 鐢垫祦鐨 ‰ 撹‡涓 粙浣 鐢  ,澶氭 ‡ ч· 堝 閫ı Æ睘绮¡瓙鍒 Ag 棰楃矑灞傚 鐜扮數 …‰ 銆傜幓鐠冩·灞傜殑鍘 �害ˆ存 褰卞搷鐫€澶 槼鐢垫睜涓 鐢 樆鐨勫 廩  19 ] , 鍘 殑鐜荤拑 欏 楂樼殑鎺ヨЕ鐢 樆 , 闃荤 鐢垫祦鐨 ‰ 銆 鐢垫祦¥犺緭鐨勬満鍒惰 ˚� � � � �3 銆�Fig. 3 銆€ Schematic diagram of current transport mechanisms[ 15 ]夌˘˙ 璁や 杩ƒ 竴 鐑 縺鍙ø數瀛愮殑鐢垫祦¥犺緭 鍒 銆傚 ‡� � � ч·鐢垫祦 犱富 湴浣嶆椂 , 鎺ヨЕ鐢 樆鍙 互寰堝皬  , 鍙 互鐢 ˚�2 銆€ 2Si “潰鐨勬 «舰‹�Ag Fig. 2 銆€ Schematic diagram of Ag2Si contact structure ˚�3 銆€ 2Si “潰鐢垫祦¥犺緭鐨勬満鍒�Agthrough Ag2Si contact浣滄 嗘  20 ] 銆傚摢绉嶄‰ ”柟‹忓崰涓诲 ˇ綅 鐑 х粨宸ヨƒª 瀹� �,涓嶅•鐨勭儳˜撳˛ 哄 褰㈡垚涓嶅•鐨  Ag2Si 鎺ヨЕ “潰褰㈠ 緢 澶х殑褰卞搷 銆備竴 潵  ,楂樻俯 ( 涓 鐑�) ¢呭£涓�, 涓† ‡ ч· 堝 犲 � �,鎺ヨЕ鐢 樆浣�; 娓╁害ˇ嶄 ¢呭£涓�, 澶氭 ‡ ч· 堝 犲 � �,鎺ヨЕ鐢 樆¥ ◢楂樹 銆�3銆€ ˜撹¶ 鏋愪簡涓 ł øœ  Ag 鐢垫瀬鐑х粨宸ヨƒ涓�Ag2Si 鎺ヨЕ 鐨勫舰鎴愭満鐞 銆傜幓�鐠冩· ㄧ數鏋佸舰鎴 ˇ嬩 鍙戞尌浜嗗叧閿 綔鐢 銆 澶 ч噺鐨�Ag 绮¡瓙›惰В浜 幓鐠冩·涔嬩 , 鍐峰˛杩囩ˆ涓�, 杩囬¥ Ø殑 Ag 绮¡瓙鏋˝currency1…剁粨鏅剁敓闀�, �Si 琛ㄩ潰褰㈡垚 噾瀛 鐘剁殑 � Ag 鏅剁矑 銆 Ag 鏅剁矑鍙 繘鍏  Si 鍙Æ皠鏋佽 130nm 銆 Æ �4 绉嶇�2鐢垫瀬鎺ヨЕ褰㈠ 銆傜數 殑¥犺緭 哄 鏅 ø琚¨涓烘槸浠•‚„ 堝 瑰 ¥犺緭 銆傛›fi�Ag 棰楃矑 銆 鏅剁矑 銆 涓夎€ 箣闂 幓鐠冩· � � Ag Si 鍘 害鐨 ¡鍚�,鐢垫祦¥犺緭 瑰 鍙堝 涓 袱姝•‚„”» 旀柟‹忓拰澶氭 ‡ ч· 堝 瑰 銆�鍙 €冩 鐚�1 銆€Ralp h E L . Recent advancement s in low co st solar cell p ro2 cessing [ C ]/ / In Proceedings of t he 11 th IEEE Photovoltaic Specialist s Co nference. Scott sdale Ariz ,1975 :315 2銆€ Dirk2 Holger Neuhaus , Adolf Munzer.Indust rial silicon wa2 3銆€ Antonio L uque , Steven Hegedus. Handbook of p hotovoltaic science and engineering [ M ] . London :Jo hn Wiley & So ns , L td ,2003 :276 4 銆€Sopori B , Mehta V , Rup nowski P , et al. Studies on f unda2 5 銆€Kyunghae Kim , Suresh Kumar Dhungel , et al. A novel ap 2 6 銆€Gunnar Schubert , Frank Huster , Peter Fat h. Physical un2 derstanding of p rinted t hick film f ront contact s of crystalline ment s[J ] . Solar Energy Mater Solar Cells ,2006 ,90 :3399 7 銆€Young R J S , Alan F Carroll. Advances in f ront2side t hick film metallizations for silico n solar cells[ C ]/ / Proceedings of 1731 t he 16 th European Photovoltaic Energy Conference , 2000 : t hick film f ront contact s on crystalline silicon solar cells[ C ] 8 銆€Schubert G , Fischer B , Fat h P. 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Thailand :Bangkok ,2004 :443銆婃潗 欏 ャ€ 鍒涘垔浜  1987 …�,鏄 牳 冩湡鍒  ,涓 浗绉戞 璁烘 ˜熻 ›愭 湡鍒�( 绉戞 Ł稿 熷垔) , 涓 浗绉Æ ‹œ 版嵁 ”潵›愭湡鍒   CN KI 熷垔鍏 版嵁 ”敹褰œ湡鍒 銆 绉Æ € 殑椋為€熷 灞曚 ‚„”鎴愭灉浜� � уcurrency1鐨勫懆 ¯缉†�, 瑰揩閫熷強鏃fi 冪 瀛︾˘˙¨ƒ鎴愭灉鐨勯˝姹備›鏃–泭澧炲己 銆備 浣跨 €宸 綔ª 鍙婂 曚� � �綅 ㈠§鑾峰緱绉戞 鎴愭灉鐨勯 鍙戞潈 Ø煡 嗕 ‡� �, 垔 嗙 璁句竴涓 ƒŁ忕º 斺€  斺€滅˘˙剁畝 モ€ 銆傛ߣ忕º浠¥垱 版€� у拰 €熷 冪˘˙ 鎴愭灉涓虹  ,涓昏 寰侀�泦瀛 湳”у己 銆 鍏ª湁鍒 ƒ”濇兂鐨勭˘˙¨•„� �,浠 杩 垚鏋滄帹… 拰瀛 湳浜†祦 銆�(5) 囩 呴』˜忚 笀 岃棰樼粍鐨 弗Ł 璁哄拰瀹℃煡 � , 淇濊瘉 囩 鐨勮川 忓�拰鍘熷垱”�, 浣 € 富瑕侀拡 瑰崥澹 銆 欐 鍙˝˘˙fi憳 銆 ˇ 欢涓˝ 夌 涓€浣� � � �€ 畝浠 銆� �mail 銆 銆� �E 鐢佃瘽 閫ı ø潃绛  ,浠 究鑱„ˆ 銆�( 6) ‚„” 鹃 呴』�涓哄浗瀹¨“ 侀儴绾у熀 戣祫鍔¸」ˆ 銆� �( 7) ‡– 涓€寰嬩¡閫€ � , 疯嚜 欏 ˇ 銆� �ˆ € •鏃fi皢ˇ 欢鐨勭數瀛愮増鍙戦€佽  mat2rev @163. co m 銆�, ( 2) 涓€˜�忛噰鐢 皢 �3 涓 湀鍐呭畨鎺¡ 琛 銆  ( 3) 濡傛湁涓€ˇ 銆 鍓´獌鎴栨妱琚 涓鸿€� � � � �,涓€鍒–悗鏋滅 浣 €呮湰浜鸿礋 銆� �12 Ballif C , Huljic D M , Willeke G , et al. Silver t hick2film Lett ,2003 ,82 (12) :1878 izatio n of Ag p recipitates in screen p rinted Ag co ntact s fo r Si 14 Ballif C , Huljic D M , Hessler2Wysser A , et al. 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