分析晶体硅太阳电池前电极形成机理

鍒嗘瀽鏅 浣撶 澶槼鐢垫睜 鍓嶇數鏋佸舰鎴愭満鐞� � �txt閫嗛 鐨勬柟鍚戯紝鏇撮€傚悎椋炵繑銆傛垜�涓嶆€曚竾浜洪樆鎸★紝鍙 €曡嚜宸辨姇闄嶃€備綘鍙戞€掍竴鍒嗛挓锛屼究澶卞幓 60鍒嗛挓鐨勫垢绂忋€傚繖纰屾槸涓€绉嶅垢绂忥紝璁╂垜浠 病鏃堕棿浣撲細鐥涜嫤 ;濂旀尝鏄 竴绉嶅揩涔愶紝璁╂垜浠湡瀹炲湴鎰熷彈鐢熸椿;鐤叉儷鏄 竴绉嶄韩鍙楋紝璁╂垜浠棤鏆囩┖铏氥€傜敓娲诲  ““ 鏄�竴鍙 锛 鍚 鏄 浜 竴鍙 銆  鐢 叉 鍙  pdf 鍙  AP 屼浣€傚璁 ⁄ƒ閫currency1  TXT锛屾“涓‹›愭 浠fifl 満 –†銆 8 ‡愭 ‚„” 銆€�2009 �7 � 涓 ‰� �23 7 � 涓 澶 у澶 槼ˆ˜˘˙  ,˚ ›˝˛ˇ ˘˙ 涓  , 510006National Engineering Research Center for Renewable Energy Center of So ut hChina , Instit ute for Solar Energy Systems , Sun Yat2sen U niversity , Guangzhou 5100060銆€ 鍓 1975 鍒 鐢 Ł澶 槼鐢垫睜鍒fi 鍓 銆 數 鏋Œ   1 ] 銆傜鍓嶅 85 浠 鐨勬 浣撶 澶槼鐢垫睜 槸 囩 涓 鍒 � � 2 ] ,閫ı 涓 łœ璁 � �Ag 嗘 お闃崇數 姹犲墠琛ㄩ潰姘 寲纭呭噺鍙嶅皠鑶滀  , 鍐嶇粡杩囬珮娓╃儳˜撳˛ 哄舰鎴�Ag2 Si 鎺ヨЕ鐢垫瀬 銆傜儳˜撳˛ 虹殑涓昏 鍔熻 鏄� �Ag 嗘›惰В SiN x 鍙嶅皠鑶� �,褰㈡垚 Ag2Si 鐢垫瀬鎺ヨЕ ; H 鍘熷瓙鐢辫〃灞傚悜鍐呴儴鎵╂暎 , 閽 鍖栦�鍐呮潅 拰缂洪櫡 ; 褰㈡垚 Al2Si 鍚堥噾岃〃闈㈠満 銆傛湰瀹為獙涓昏 瑰湪楂樻俯鐑� х粨‡′欢涓�Ag2Si 鎺ヨЕ鐨勫舰鎴愭満鐞嗗強鐢垫祦犺緭 鍒惰繘琛屼簡鍒嗘瀽 銆� �Ag 嗘涓昏�鍖呭惈 肩數‡愭 銆 鐜荤拑 � � Glass f rit 銆 currency1満绮 渭 鍚堝墏 銆 currency1満›fi墏 � � � , 鍏肩數‡愭涓昏 鏄� �0. 1 m 鑷冲崄 犲井绫崇殑 閾堕 绮� �, 犳祮 欐€昏川 忕殑 60 锝�80 , 鐜荤拑 欎富瑕佹槸姘у寲鐗� PbO 銆 �O3 銆�2 銆�3 銆� 绮currency1湯 , 犳祮 欐€昏川 忕殑 5 锝�B SiO BiO ZnO [2 - 4] 10 銆 鍒扮鍓嶄 姝� �, 逛 鍒峰墠鐢垫瀬鐨勭儳˜撳˛ 烘満鐞嗚繕瀛ƒ湪 璁稿 浜夎 � ,浣嗘槸 褰卞搷鍏fi湪鍟嗕笟鍖栧お闃崇數姹犵敓浜т 鐨勫 „ � [ 4 ] 銆傜儳˜撳˛ 鐢垫瀬 纭 涔 棿褰㈡垚 鐨勬 嗘  � 閫ı 浣 €  ,鐢�,1956 敓 , 鐢熷  , 欐 銆€E2mail shenhui1956163. co m3 ˚ 863 璁 洪噾 2006AA05Z409 ; €璁 � 2007A010700002‡ � 鐢�,1981 敓 ,纭 ‚„”鐢�,涓昏 浠鏅 纭呭お闃崇數姹犵˘˙fi˛浣�銆€� Tel 020239332864 銆€E2mail lijunyong gmail. com 銆€ �f ro nt contact s and t he fo rmation mechanisms of Ag2Si contact s are investigated. Fo ur types of interface st ruct ures of nisms are co ncluded to be two2step and multi2step t unneling p rocess f ro m emitter to t he silver t hrough glass layers. Key words 銆€銆€ solar cell , f ront co ntact , sinter , Ag2Si co ntact sanisms of Ag2Si contact s and t he current t ranspo rt mechanisms are still not well understood. The sintering p rocess of鎺ヨЕ褰㈡垚 虹⁄浠強鐢垫祦犺緭 哄 , 瑰墠鐢垫瀬鐑х粨宸ヨƒ浠強 Ag2Si 鎺ヨЕ鐨勫舰鎴愭満鐞嗚繘琛屼簡鍒嗘瀽 ,˝currency1浜�4 绉�Ag2Si “潰 鐨勬 舰‹ 銆傛›fifl鍚殑�“潰鎺ヨЕ褰㈠ ,鎸–currency1涓† ‡ ч 堝 姝‚„” „數 ‰ ”満鍒槸 €涓昏 鐨� �勭數 ‰ ”柟 ‹忋€�澶 槼鐢垫睜 銆€ 鍓嶇數鏋 銆€ 鐑 х粨 銆€ 2Si 鎺ヨЕ Ag 鍏 銆€銆€�Ag2Si contact s are p resented. According to different types of interface struct ures , t he main current t ransport mecha2screen p rinting technique to form t he silver f ro nt contact s and aluminium rear contact s. However , t he fo rmation mech2 銆€銆€ ˆ˜墠 傚満涓� �85 浠 鐨勬 浣撶 澶槼鐢垫睜 囩 涓 ł œ € �澶–墠 銆 數鏋 銆備 浜嗕簡 ˘墠鐢垫瀬鐨� � �Ag2SiAnalysis of the Formation Mechanisms of Front Contacts of Crystalline Si Solar CellsL I J unyo ng , L IAN G Zo ngcun , ZHAO Ruqiang , J IN J ingsheng , S H EN HuiAbstract 銆€銆€ p resent , mo re t han 85 of t he crystalline Si solar cells in t he world market are p roduced using At鏅 纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚 虹⁄鍒嗘瀽 3‡ �,˙佸瀛�, 垫˚‹�, �, 銆€ � �1銆€ 瀹為獙�,鍏˝ 鐨勫˛ ˇ 鐑� х粨€俯 銆傜儳˜撳 俯 浣� �, 鍒欐 闈 數鏋 閫�SiN x 鑶�, 涓 鐢 樆杩– ,琛ㄩ潰 H 鍘 瀛愭 浣撳 鐨勬 �澶�, 涓 currency1閽 寲浣撳 缂洪櫡 ; 儳˜ €俯 楂� �,Ag 鐢垫瀬 閫�n 灞傚 勫 , 涓�p Ł 琛 鎺ヨ� Е ,褰㈡垚Œ 烘 粨  , 浣 殑惰 鐢 樆 岃澶х殑鍙嶅悜 忕數 �,闄嶄 澶 槼鐢垫睜 ı 銆  囩 鐢 樆鐜 1 锝�3ł 銆�00 ] 鍚殑 œ 纭 鍒fi 澶� �cm [ 闃崇數姹 銆傚お�闃崇數姹犵殑鐢 宸ヨƒ涓� 鍘昏〃闈㈡ 鍙婂 澶囪〃闈 瓧濉„粧闈� �; 娑叉€�POCl 3 鎵╂暎褰㈡垚 n 灞�, 瑰潡鐢 樆涓�45 锝� 55ł/ sq ; 绛夌 瀛愪 鍒昏殌 紭 � n 灞�;鍘婚櫎纾 鐜荤拑 � ; PECVD 闀€ SiN x 忓弽 勮啘 ,绾�75nm 鍘�; 鍒嗗埆 囩 涓 ł œ宸ヨƒ鍒fi 鐢垫瀬 銆 岃〃闈㈠満 � � � �Ag 姝ｇ數鏋�,Ag 嗘 囩 鍟嗙 Ferro332 Al 462 祮 �; 閾 鐑х粨鐐 竴 儳˜�, €楂樻俯 瀹氫  880 鈩冦€ 瘯 � I2V 鐗规€ 銆 囩 � � Quanta 400 F E G 哄 勬壂忕數瀛愭樉寰 暅  SEM � �Si2Ag 鐢垫瀬 潰  ,堕噰鐢�EDS Energy disper sive spect rom2 eter ,介噺 叉暎璋变华 鍒嗘瀽鍏垚鍒 銆� �鏅 纭呭お闃崇數姹犲墠鐢垫瀬褰㈡垚 虹⁄鍒嗘瀽/ ‡ 囩瓑9 浘 1 涓 偣  3 浣嶇疆 ,鐑х粨瀹殑 Ag 鐢垫瀬 惈 夎 澶 殑 Si , 存槑鐜 鐠 � � ��SiN x 鑵 铓€ 浣 鐢 銆� � � � �G. Schubert 绛塠 8 ] 閫 杩� �SEM/ EDS 鍒嗘瀽涔熷 鐜�, 鐑х粨鍚 幓鐠冩涓 湁  Pb currency1穩浜х敓 銆�B. Sopori 绛塠 4 ] 璁や , 娓╃儤叉椂 ,嗘涓�Ag 棰楃矑琚 皬鐗 鐘剁幓鐠冩棰楃矑鍒嗙  ,湪 450 鈩�,鐜荤拑 欏紑 Ł啍鍖栧苟瑕嗙洊 鏃� �Ag 棰楃矑琛ㄩ潰 , �600 鈩�,Ag 棰楃矑琚 啍铻嶇殑鐜荤拑 欐 鍖呭洿 銆 鏃 ‡忕潃娓╁害鐨勫崌楂�, 褰�Ag 棰楃矑鍒嗗竷浜 啍铻嶇殑鐜荤拑 欎 鏃�, Ag 棰楃矑琛ㄩ潰涓 幓鐠冩鍙敓绂诲瓙浜† , fi湪 Ag 棰楃矑琛ㄩ潰褰㈡垚涓€ 灞�Ag2M2Si 娑叉€ 浉 M 涓虹幓鐠冩涓 殑 睘鍏冪礌 銆傚 鐜荤拑 鐔旈€� �SiN x 灞傚悗 ,‹€ 嬩 纭�n 鍙皠鍖哄 鎺ヨЕ ,剁户˜ 鐢熸哀鍖 杩ƒ師鍙嶅  ‹� 1 銆傜敓鎴愮殑 SiO2 ›惰В浜 幓鐠冩涓�,Ag 棰楃矑 “潰澶勮仛闆� �, 杩滅 �Si 琛ㄩ潰鐨�Ag 棰楃矑涔浉浜掕仛闆嗘 湪涓€ 銆�傚 ˚� �1 鎵€绀�,鐑х粨鍚�,Ag 棰楃矑闂村苟涓嶆槸褰㈡垚闈炲父绱у瘑鐨 ˜”瀯 � ,屾槸澶 瓟˜”瀯 ,鍙 互鍒†柇瀹為檯褰㈡垚  Ag2Si 鎺ヨЕ鐨�Ag 鎴 鍒嗗苟涓嶆槸 � Ag 棰楃矑 ,屾槸閫ı 绂诲瓙浜† ›惰В浜 幓鐠冩涓 殑  Ag 鍘熷瓙 銆傚 ˚� �1 涓 偣  1 銆�4 鎵€绀�, ㄧ晫闈㈠ 瀛ƒ�湪 Ag 銆 銆� �, 鍙 鐐� �Pb Si 幓鐠冩涓 鐗– 鐢簡鍙嶅 � , Ag ㄨ 澶勬矇娣€ 銆傜幓鐠冩杩ƒ彲 浠 綔涓 竴闃绘尅灞傛潵 忓皯 Ag 鎵╂暎杩涘叆 n 鍙皠鍖哄拰 p2n ˜ 鍖篬 �9 ] ,浠庤€ 鍔 浜 ˜ 鍖 鏃 ˜ 鍚 鐢 銆傛湁 ‚ ˙ 璁 涓篬 � � � � � � � � � � � � � � � � � � 10 ] ,濡傛灉℃湁鐜荤拑 欎粙浜�Ag 棰楃矑涓 涔 棿 � , ㄧ儳˜撹 ˇ 渭 涓� �,Ag 鍘熷瓙鍙 互鎵╂暎鑷崇 � 5 m 娣卞 銆 鐑� � х粨€俯 鍚庤繘琛揩閫熷喎 �,Ag 鐢垫瀬涓�Si 涔 闂磋 褰㈡垚澶 “潰鎺ヨ� � Е褰㈠ 銆傜幓鐠冩涓 殑纭呭湪纭 涓婂 寤 嶇粨鏅  ,�Ag 鏅剁矑 ㄧ 鐗囪〃闈 鏋˝currency1涓旈殢鎰忓 銆傚湪閫傚 鐨勭儳˜”俯 笅 � � � ,Ag 鏅剁矑鐨勭粨鏅剁敓闀 Si 澶栧欢 瑰悜涓€鑷碵 11 ,12 ] 銆 夌˘˙惰€呴€ı � T EM 鍒嗘瀽[ 13 ,14 ] 鍙 , 噾瀛˝ 褰 鐨� �Ag 鏅 绮 敓闀 繘鍏fl � n 鍙皠鍖哄 �, 鍙湁 犵 绫冲 �, 屾湁浜 鍒欐湁 犵 绾崇 澶� у皬 , 涓 繖绫绘矇娣€ ㄧ晫闈㈠ 鍒嗗竷℃�湁 勫 , 涓€ 涓哄€ 噾瀛 琛ㄩ潰灞 Ł {111} 鏅堕潰 銆傚 闄 ,Ag 鏅剁矑杩涘叆 鍙皠鏋佸苟涓嶆槸ˆ存 涓�Si 鎺ヨЕ[ 15 ] , �Ag 涓�Si 涔 棿杩ƒ ㄧ害 5nm 鐨勭幓鐠冩灞 銆傚浘 � 1 涓 偣  2 浣嶇疆涓昏 鏄� �Ag �Si 鍏冪礌 銆 ㄨ 鐐瑰 槸 � �Ag ˆ 矇娣€ 銆 g currency1穩鍙 互杩涘叆  n 鍖哄 ㄨ 130nm[ 12 ] 銆 鐢变Ł 栧鏄 啍铻嶇幓鐠冩�涓 �n 鍙皠鍖烘 �, ›惰В ㄧ幓 鐠冩涓 殑  Ag 湪纭 〃闈㈡瀽 虹粨鏅“杩涘叆 n 鍙皠鍖虹粨鏅�, ˚ 姝 浜 舰鎴愮殑“潰 瀛ƒ湪浠 笅 犵 褰㈠ � � 1 澶�Ag 棰楃矑/ 勫 鐜荤拑 � 0 锝�20nm / Ag 鏅剁矑/ 勫 鐜荤拑 � 5nm 宸 / Si ; 2 澶�Ag 棰楃矑/ ›惰В浜�Ag 鍘熷瓙鐨勫 鐜荤拑 欏 / Si ; 3 澶�Ag 棰楃矑/›惰В浜�Ag 鍘熷瓙鐨勫 鐜荤拑 欏 / Ag 鏅剁矑/ 勫 鐜荤拑 �Si ,湪姝 鎺ヨЕ褰㈠涓�,鍘 殑鐜荤拑 欏 涓 湪闈犺  Si 鍙皠 鏋 殑涓€ т細瀛ƒ湪涓€浜 棤 Ag 绮瓙鐨勫� 姝˘父鐑х粨呭涓⁄皬 浜�20nm [ 15 ] ,杩欎富瑕佹槸鐢变Ł 喎 磋 ˇ嬩 ,Ag 绮瓙杩囬 屾瀽 哄苟 �Si 琛ㄩ潰 嶆ƒ˜” 鐢currency1 , 娑€“簡鐜荤拑 欎 鐨�Ag 绮瓙 ; 4 夌˘˙惰€ 繕鍙 [ 15 ] , Ł‹鐨�SiN x 鑶滀› currency1鐜湪 愪 鍖 � �,鐗瑰埆鏄 湪 œ 纭呴噾瀛 ˜ 潰˜”瀯鐨勫  , 鐑х粨娓╁害fifl , Ł‹鐨�SiN x 鑶 澶�,浠庤€“樆姝 簡鐜荤拑 欎 鐨� �Ag 鍚 涓–粨鏅 鐢currency1 銆備鍚晫闈 殑鎺ヨ� � Е褰㈠ 佸浘 2 銆 浠互涓婂 鏋˝彲†� �,鐜荤拑 欎 鐨勬哀鍖 涓�Si 琛ㄩ潰鍙敓姘у寲 杩ƒ師鍙嶅 鐢熸垚 Pb ,Pb ›惰В浜 幓鐠冩涓�, 瑰舰鎴愭 嗘 ‡鍒 2銆€ ˜”灉鍙婂 鏋�數姹犳鎸囩數鏋佸拰涓绘绾 柇闈繘琛�SEM 鍒嗘瀽 , 鍏剁粨鏋 濡傚浘 � 1 鎵€绀 銆傚� Ag2Si “潰涓嶅浣嶇疆杩涜 �EDS 鍒嗘瀽 ,鍏fi‚鍏 绱犲惈 忓湪琛� �1 涓 „” 銆 琛  1 銆€EDS 鍒嗘瀽˚�1 涓 ‚鐐规垚鍒嗗惈 „” ˚  1 a 鐐 鐐� �Table 1 銆€EDS analysis result s of t he point s in Fig. 1鎴˝ Si 鍘熷瓙鍒嗘 Ag Pb鐐�鐐�˚�1 b 鐐�12. 71 52. 56 0. 79 33. 9442. 29 10. 59 2. 30 44. 8250. 83 0. 52 07. 85 023. 58 7. 96 0. 6942. 33 49. 82鍏fi‰48. 6567. 77 瀹€ 琛ㄧ 瘯杩囩ˆ涓˜currency1鐜扮殑 � � C 銆 绛currency1垚鍒� �O2. 1 銆€ 鐑х粨宸ヨƒ 銆傜儳˜撶浣˘俯娓╁害涓€ 湪 � 400 鈩 浠 � , 涓 俯娓╁害涓  300 锝�700 鈩 楂�樻俯娓╁害涓�700锝�00 鈩冦€傚湪浣˘俯闃 , 嗘涓 殑 currency1満 ›fi墏 屾湁 虹˙鍚堝墏琚鍙戞“琚 ˚鐑  ; 娓 �, 鐜荤拑 欏紑 Ł啍鍖�,Ag 棰楃矑‹€ 仛鍚�; ㄩ珮娓 �,Ag 銆 鍙˝幓鐠冩鎴˝ � Si 鍙敓鍙嶅 , 褰㈡垚 Ag2Si 鎺ヨЕ ; 鍐峰˛鏃�, Ag 绮瓙 ㄧ 鐗囪〃闈 粨 鏅剁敓闀 銆ˇ珮娓鍔ㄨ〃闈� � �H 鍘熷瓙鍚 鐗– 銆傚 闄呭湪� �纭 鐗 鍙敓鐨勫弽 旀俯 浣Ł鐑� х粨鐐夎瀹 殑娓╁害  , Kyunghae [5] Kim 绛 ‚„”�鍙 ,Ag 涓�Si 鐨勫 闄呮˝浣冲弽 旀俯 605 鈩 杩滀 浜� �Ag2Si 鍏辨 鐐 殑娓╁害 835 鈩 杩欏彲槸鐢变Ł鍙嶅 浣撶ˆ 涓˜惈 ˆ 垚鍒� � � Ag 銆 銆 銆 绛 屼 鍚堥噾� � � �鐔„偣闄嶄 銆傚 姝�Si Pb Bi €瑕 鍚€ n 灞傜殑鎵╂暎 撳害 銆 嗘鎴˝ �銆 忓弽 勮啘鍘 害绛 稿 ˚犵礌‡ヨ 瀹 儳˜撶鍚勬俯鍖哄 闄 殑娓╁害 銆 鑵 殌˙ €� � � ��SiN x 鑶�, 浣�Ag 棰楃矑 涓 鍙皠鍖哄 鐢數瀛 � � � 6 ] 銆傚湪 稿 ˚鐑уcurrency1満›fi墏鐗 川涔⁄悗 , 鐜荤拑 欏紑 Ł啍 鍖 € 娑寲 屾 � �SiN x 琛ㄩ潰 ,˜ц€屾 �Ag 棰楃矑 岃 铓€鎺�SiN x 灞 銆傜幓鐠冩鑵 殌 � SiN x 灞 ˇ⁄ 鐢殑姘у寲杩ƒ師鍙嶅 涓篬 7 ] 銆€銆€銆€銆€x Si 2MO x ,glass x SiO2 2M ‹ M 涓虹幓鐠冩涓殑 睘鍏冪礌  ,涓昏 鏄� �Pb 銆� 12. 2 銆€ 2Si 鎺ヨЕ鐨勫舰鎴愭満鐞�Ag˚ 銆€ 鐢垫睜Ł呮鐢垫瀬� a 屼富Ł 數鏋 �b 鍓Œ潰鐨�SEM ˚ Fig. 1 銆€ SEMcross2section image of Ag gridline a andAg busbar bŁ– 鐑х粨宸ヨƒ €瑕 粡杩 娓 銆 涓 俯 銆 楂樻俯 銆 鍐峰˛ � � � � 4 涓 鐜荤拑 欏湪 Ag2Si 鎺ヨЕ褰㈡垚杩囩ˆ涓 鎸 簡鍏 鐨 綔鐢  , 瀹�10 ‡愭 ‚„” 銆€�2009 �7 � 涓 ‰� �23 7 �涓€瀹 殑浣滅 [ 16 ] 銆備 �Ag 鐨勭粨鏅剁敓闀 熷 ヨ繕 �Pb 绮瓙 鐨勭粨鏅剁敓闀�,濡傚浘 1 b 涓 偣  1 鎵€绀 銆 � b 鐨勬矇娣€ 虹⁄ 娓 � �,ˆ 墠杩樻病 夌浉鍏 „ 銆� �2. 3 銆€ 鐢垫祦犺緭 哄 ˆ 墠  , 逛 鍒�Ag 鐢垫瀬鐨勭數 ‰ ”満鍒惰繕℃湁寰 fl 寰堝 鐨勮В �, ㄧ晫闈㈠ 瀛ƒ湪澶 鎺ヨ� � Е褰㈠ 濡備 闈㈡ 鍒嗘瀽鐨�4 绉嶆 舰‹� 銆傛 ˘˙惰€17 ] 璁や 鐢垫祦犺緭鏄 粡杩囩洿鎺–殑  Ag2Si 鎺ヨЕ 鐢殑 , 浣嗘槸閫ı 鍒嗘瀽鐑х粨杩囩ˆ涓 幓鐠冩鐨勬祦 鍔 € у強鍏 �Ag ㄧ幓鐠冩涓 瀽 虹殑˜” 璁や  , 鐜荤拑欏 瀛ƒ湪浜ı浣 殑 � Ag2Si 鎺ヨЕ涔 棿 , ˚犳 涓嶅 ㄧ洿鎺–殑  Ag2Si 鎺 銆傜� �幓鐠冩涓€ 璁や 鏄 ˜ 缂 浣  , 鍏 鐢 闃荤 楂 � � � �109ł cm[ 12 ] 銆傜 浜 幓鐠冩涓 ł簡  Ag 绮瓙 ,ˆ 墠鏅 璁 閫ı ‡ „” 旀潵犺緭鐢垫祦  [ 6 ,12 ,18] 銆�Ching2 His Lin 绛塠 15 ] 璁や 峰œ瀹氫綔鐢ㄧ殑鏄 €ı  Ag 鏅剁矑2 勭幓鐠冩灞�Si “潰鐨勭數 ‰ 銆傜 浜˘绉嶆 舰‹忕殑鐜荤拑 欏 闈炲父 � � Ł 5nm , 涓 浠 垚涓虹數 ‰ 撶殑闃绘尅灞�, 鐢 瀛˝彲鐢 ‚„” 旈€ı 銆 € �‰ 竴绉嶆 舰‹  , 鐢变Ł n 鍙皠 鍖哄 銆 鏅剁矑 銆 棰楃矑涔 棿 槸ˆ 勭殑鐜� �荤拑 欏 鍙 涓  Ag Ag 鐢垫祦鏄 €ı 涓† ‡  ч 堝 犺緭鐨 銆 € 浜 浜 銆 涓� � �夌 鎺ヨ� Е褰 ‹� �,鍘 殑鐜荤拑 欎 ›惰В鐨勯噾灞炵矑瀛愪 鐢垫祦鐨 ‰ 撹‡涓 粙浣 鐢  ,澶氭 ‡ ч 堝 閫ı 睘绮瓙鍒 Ag 棰楃矑灞傚 鐜扮數 ‰ 銆傜幓鐠冩灞傜殑鍘 �害ˆ存 褰卞搷鐫€澶 槼鐢垫睜涓 鐢 樆鐨勫 廩  19 ] , 鍘 殑鐜荤拑 欏 楂樼殑鎺ヨЕ鐢 樆 , 闃荤 鐢垫祦鐨 ‰ 銆 鐢垫祦犺緭鐨勬満鍒惰 ˚� � � � �3 銆�Fig. 3 銆€ Schematic diagram of current transport mechanisms[ 15 ]夌˘˙ 璁や 杩ƒ 竴 鐑 縺鍙數瀛愮殑鐢垫祦犺緭 鍒 銆傚 ‡� � � ч鐢垫祦 犱富 湴浣嶆椂 , 鎺ヨЕ鐢 樆鍙 互寰堝皬  , 鍙 互鐢 ˚�2 銆€ 2Si “潰鐨勬 舰‹�Ag Fig. 2 銆€ Schematic diagram of Ag2Si contact structure ˚�3 銆€ 2Si “潰鐢垫祦犺緭鐨勬満鍒�Agthrough Ag2Si contact浣滄 嗘  20 ] 銆傚摢绉嶄‰ ”柟‹忓崰涓诲 ˇ綅 鐑 х粨宸ヨƒ 瀹� �,涓嶅鐨勭儳˜撳˛ 哄 褰㈡垚涓嶅鐨  Ag2Si 鎺ヨЕ“潰褰㈠ 緢 澶х殑褰卞搷 銆備竴 潵  ,楂樻俯 涓 鐑� 呭涓�, 涓† ‡ ч 堝 犲 � �,鎺ヨЕ鐢 樆浣�; 娓╁害ˇ嶄 呭涓�, 澶氭 ‡ ч 堝 犲 � �,鎺ヨЕ鐢 樆 ◢楂樹 銆�3銆€ ˜撹 鏋愪簡涓 ł œ  Ag 鐢垫瀬鐑х粨宸ヨƒ涓�Ag2Si 鎺ヨЕ 鐨勫舰鎴愭満鐞 銆傜幓�鐠冩 ㄧ數鏋佸舰鎴 ˇ嬩 鍙戞尌浜嗗叧閿 綔鐢 銆 澶 ч噺鐨�Ag 绮瓙›惰В浜 幓鐠冩涔嬩 , 鍐峰˛杩囩ˆ涓�, 杩囬 殑 Ag 绮瓙鏋˝currency1剁粨鏅剁敓闀�, �Si 琛ㄩ潰褰㈡垚 噾瀛 鐘剁殑 � Ag 鏅剁矑 銆 Ag 鏅剁矑鍙 繘鍏  Si 鍙皠鏋佽 130nm 銆 �4 绉嶇�2鐢垫瀬鎺ヨЕ褰㈠ 銆傜數 殑犺緭 哄 鏅 琚涓烘槸浠‚„ 堝 瑰 犺緭 銆傛›fi�Ag 棰楃矑 銆 鏅剁矑 銆 涓夎€ 箣闂 幓鐠冩 � � Ag Si 鍘 害鐨 鍚�,鐢垫祦犺緭 瑰 鍙堝 涓 袱姝‚„” 旀柟‹忓拰澶氭 ‡ ч 堝 瑰 銆�鍙 €冩 鐚�1 銆€Ralp h E L . Recent advancement s in low co st solar cell p ro2 cessing [ C ]/ / In Proceedings of t he 11 th IEEE Photovoltaic Specialist s Co nference. Scott sdale Ariz ,1975 315 2銆€ Dirk2 Holger Neuhaus , Adolf Munzer.Indust rial silicon wa2 3銆€ Antonio L uque , Steven Hegedus. Handbook of p hotovoltaic science and engineering [ M ] . London Jo hn Wiley So ns , L td ,2003 276 4 銆€Sopori B , Mehta V , Rup nowski P , et al. Studies on f unda2 5 銆€Kyunghae Kim , Suresh Kumar Dhungel , et al. A novel ap 2 6 銆€Gunnar Schubert , Frank Huster , Peter Fat h. Physical un2 derstanding of p rinted t hick film f ront contact s of crystalline ment s[J ] . Solar Energy Mater Solar Cells ,2006 ,90 3399 7 銆€Young R J S , Alan F Carroll. Advances in f ront2side t hick film metallizations for silico n solar cells[ C ]/ / Proceedings of 1731 t he 16 th European Photovoltaic Energy Conference , 2000 t hick film f ront contact s on crystalline silicon solar cells[ C ] 8 銆€Schubert G , Fischer B , Fat h P. 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