Meyer Burger-Rico BOEHME

EXCEEDING 23% CELL EFFICIENCY WITH MEYER BURGER SINGLE SIDE PASSIVATED CONTACT TECHNOLOGY SNEC 2019, June 4, 2019 Thomas Kluge1, Thomas Grosse1, Hans-Peter Sperlich1, Dirk Landgraf1, Sandrine Lauretta Fondop Makoudjou1, Marcel König1, Naomi Nandakumar2, Shubham Duttagupta2, John Woodrofee Rodriguez2, Rico Boehme1 1 Meyer Burger GmbH, An der Baumschule 6 – 8, 09337 Hohenstein-Ernstthal 2 Solar Energy Research Institute of Singapore © Meyer Burger GLOBAL TECHNOLOGY ROADMAP 2 ▪ p-PERC is mainstream „work horse“ ▪ CE improvement slowing for mass-produced PERC (+0.1%+0.3% per year) ▪ n-type technology industrially ready ▪ n-TOPCon/monoPolyTM likely next evolutionary upgrade technology for existing PERC lines ▪ n-HJT likely to be green field technology-of- choice with higher CE and less complexity ▪ 3rd generation solar cell technologies like perovskite-on-Si in focus Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger HIGH EFFICIENCY CELL TECHNOLOGIES: HJT AND TOPCON GAINING MOMENTUM 0 5 10 15 20 25 30 20222016 202120192015 2017 20202018 2023 CAGR +23%GW Source: PV InfoLink, Dec 2018 PERT HJT TOPCon IBC 3 Capacity forecast for n-type technologies Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger TOPCON: SMART TOOLS AND LEAN PROCESS SEQUENCE TO INDUSTRIALIZE PASSIVATED CONTACT CELLS Meyer Burger booth N3 510 © Meyer Burger WHY MEYER BURGER PASSIVATED CONTACT TECHNOLOGY IS SO INTERESTING? 5 ▪ Cell Efficiency 23.0%, Module Power 340W* within one year ▪ TOPCon cell is bifacial ▪ With MB passivated contacts: recombination loss at cell rear side: J0 23.5% 700mV Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger8 HOW TO MAKE 23.0% EFFICIENCY IN MASS PRODUCTION? ▪ Standard tools from PERC line: ✓ Texturing wet bench ✓ Annealing tube ✓ Passivation tool(s) ✓ Printing line ▪ Modified tools from PERC line: ✓ Boron Diffusion tube (facility + ~30% capacity) ✓ BSG removal + SSE wet bench (recipe) ▪ Tools not needed for TOPCon line: x Laser Tools (SE and LCO) x LID Curing ▪ New Tools for TOPCon Line: ➢ CAiA ➢ Short Clean wet bench LEAN PROCESS SEQUENCE Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger HOW TO MAKE 23.0% EFFICIENCY IN MASS PRODUCTION? 4 3 2 1 Optimized single side etching ▪ Complete cleaning of rear side from boron doped Si Excellent boron diffusion ▪ Boron diffusion: 90 Ohm/sq., ▪ J0,e optimization Shunt and Irev2 Reduction 23.0% EFFICIENCY IN MASS PRODUCTION? Meyer Burger , SNEC 2019, Shanghai, June 2019 Vrev2 = -14V 1. Avoid wrap around of: • Boron Emitter ➔ Optimized post treatment • Doped a-Si Layer ➔ Optimized PECVD plasma deposition process • AlOx passivation ➔ MAiA/FABiA process 2. Avoid contamination and touching surface during wafer handling and transport! • FABiA 3in1 PECVD: Front AlOx/SiNx and Rear SiNx made in one machine • CAiA, 2in1 PECVD: Oxide and doped poly-Si layer made in one machine 3. Development of metallization pastes for suitable contact formation at boron emitter and poly-Si layer. PROCESS ADJUSTMENT Irev2 Reduction FF 81.34% ETA 23.46% Voc 697.1mV Isc 10.11 A Champion Cell Op tim ize d Pr oce ss Meyer Burger booth N3 510 © Meyer Burger11 CAIA® PLATFORM FOR FULLY INTEGRATED TOPCON/MONOPOLY PROCESSES • No wrap around • All required layers are processed in one tool • Very high quality interface oxide • Doping possible for n- and p-type sequences • Best in class total cost of ownership Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger12 FABIA® ONLY TOOL INTEGRATING ALL DIELECTRIC LAYER DEPOSITIONS IN ONE TOOL • Based on MAiA® platform which is the market‘s leading PERC solution • Ideal tool for PERC and complemented by CAiA® for manufacture of passivated contact cells • Proprietary and patented process – freedom to operate at Meyer Burger‘s best ability • OPEX savings: 50% of local competition Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger SUMMARY Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger SUMMARY • N-type technologies TOPCON and HJT opening larger potential for CE improvements and cost reduction • Meyer Burger supports TOPCon technology stream with unique products (CAiA® for TOPCON & FABiA®) for industry leading CE and module powers (MB´s SWCT module) • 23.5% “Golden Cell“ efficiency and 23.1% “Golden Run“ efficiency • 335W Module Power with SWCT (60 cells, Full Cell, M2, GB) • Irev2 and shunting: ➢ Solved using most lean process sequence developed together with SERIS ➢ Combination of optimized diffusion, optimized SSE and CAiA ➢ No Wrap-around of doped a-Si during PECVD deposition because of optimized plasma deposition process • Complemented equipment for TOPCon by Meyer Burger ➢ CAiA Lab tool, sold to first customers ➢ CAiA Production tool available end of 2019 ➢ FABiA 6.1 tool available NOW 14 Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 © Meyer Burger MERCI THANK YOU … AND SEE YOU AT OUR BOOTH N3 510!!!! Dr. Rico Boehme Head of Global Technical Sales Meyer Burger +49 174 3437284 Meyer Burger , SNEC 2019, Shanghai, June 2019 I thank… …all of Meyer Burger‘s customers for their trust …R&D team at Meyer Burger …SERIS Meyer Burger booth N3 510