Meyer Burger-Rico BOEHME

EXCEEDING 23 CELL EFFICIENCY WITH MEYER BURGER SINGLE SIDE PASSIVATED CONTACT TECHNOLOGY SNEC 2019, June 4, 2019 Thomas Kluge1, Thomas Grosse1, Hans-Peter Sperlich1, Dirk Landgraf1, Sandrine Lauretta Fondop Makoudjou1, Marcel Knig1, Naomi Nandakumar2, Shubham Duttagupta2, John Woodrofee Rodriguez2, Rico Boehme1 1 Meyer Burger GmbH, An der Baumschule 6 – 8, 09337 Hohenstein-Ernstthal 2 Solar Energy Research Institute of Singapore Meyer Burger GLOBAL TECHNOLOGY ROADMAP 2 ▪ p-PERC is mainstream „work horse“ ▪ CE improvement slowing for mass-produced PERC 0.10.3 per year ▪ n-type technology industrially ready ▪ n-TOPCon/monoPolyTM likely next evolutionary upgrade technology for existing PERC lines ▪ n-HJT likely to be green field technology-of- choice with higher CE and less complexity ▪ 3rd generation solar cell technologies like perovskite-on-Si in focus Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger HIGH EFFICIENCY CELL TECHNOLOGIES HJT AND TOPCON GAINING MOMENTUM 0 5 10 15 20 25 30 20222016 202120192015 2017 20202018 2023 CAGR 23GW Source PV InfoLink, Dec 2018 PERT HJT TOPCon IBC 3 Capacity forecast for n-type technologies Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger TOPCON SMART TOOLS AND LEAN PROCESS SEQUENCE TO INDUSTRIALIZE PASSIVATED CONTACT CELLS Meyer Burger booth N3 510 Meyer Burger WHY MEYER BURGER PASSIVATED CONTACT TECHNOLOGY IS SO INTERESTING 5 ▪ Cell Efficiency 23.0, Module Power 340W* within one year ▪ TOPCon cell is bifacial ▪ With MB passivated contacts recombination loss at cell rear side J0 23.5 700mV Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger8 HOW TO MAKE 23.0 EFFICIENCY IN MASS PRODUCTION ▪ Standard tools from PERC line ✓ Texturing wet bench ✓ Annealing tube ✓ Passivation tools ✓ Printing line ▪ Modified tools from PERC line ✓ Boron Diffusion tube facility 30 capacity ✓ BSG removal SSE wet bench recipe ▪ Tools not needed for TOPCon line x Laser Tools SE and LCO x LID Curing ▪ New Tools for TOPCon Line ➢ CAiA ➢ Short Clean wet bench LEAN PROCESS SEQUENCE Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger HOW TO MAKE 23.0 EFFICIENCY IN MASS PRODUCTION 4 3 2 1 Optimized single side etching ▪ Complete cleaning of rear side from boron doped Si Excellent boron diffusion ▪ Boron diffusion 90 Ohm/sq., ▪ J0,e optimization Shunt and Irev2 Reduction 23.0 EFFICIENCY IN MASS PRODUCTION Meyer Burger , SNEC 2019, Shanghai, June 2019 Vrev2 -14V 1. Avoid wrap around of Boron Emitter ➔ Optimized post treatment Doped a-Si Layer ➔ Optimized PECVD plasma deposition process AlOx passivation ➔ MAiA/FABiA process 2. Avoid contamination and touching surface during wafer handling and transport FABiA 3in1 PECVD Front AlOx/SiNx and Rear SiNx made in one machine CAiA, 2in1 PECVD Oxide and doped poly-Si layer made in one machine 3. Development of metallization pastes for suitable contact formation at boron emitter and poly-Si layer. PROCESS ADJUSTMENT Irev2 Reduction FF 81.34 ETA 23.46 Voc 697.1mV Isc 10.11 A Champion Cell Op tim ize d Pr oce ss Meyer Burger booth N3 510 Meyer Burger11 CAIA PLATFORM FOR FULLY INTEGRATED TOPCON/MONOPOLY PROCESSES No wrap around All required layers are processed in one tool Very high quality interface oxide Doping possible for n- and p-type sequences Best in class total cost of ownership Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger12 FABIA ONLY TOOL INTEGRATING ALL DIELECTRIC LAYER DEPOSITIONS IN ONE TOOL Based on MAiA platform which is the market‘s leading PERC solution Ideal tool for PERC and complemented by CAiA for manufacture of passivated contact cells Proprietary and patented process – freedom to operate at Meyer Burger‘s best ability OPEX savings 50 of local competition Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger SUMMARY Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger SUMMARY N-type technologies TOPCON and HJT opening larger potential for CE improvements and cost reduction Meyer Burger supports TOPCon technology stream with unique products CAiA for TOPCON FABiA for industry leading CE and module powers MBs SWCT module 23.5 “Golden Cell“ efficiency and 23.1 “Golden Run“ efficiency 335W Module Power with SWCT 60 cells, Full Cell, M2, GB Irev2 and shunting ➢ Solved using most lean process sequence developed together with SERIS ➢ Combination of optimized diffusion, optimized SSE and CAiA ➢ No Wrap-around of doped a-Si during PECVD deposition because of optimized plasma deposition process Complemented equipment for TOPCon by Meyer Burger ➢ CAiA Lab tool, sold to first customers ➢ CAiA Production tool available end of 2019 ➢ FABiA 6.1 tool available NOW 14 Meyer Burger , SNEC 2019, Shanghai, June 2019 Meyer Burger booth N3 510 Meyer Burger MERCI THANK YOU AND SEE YOU AT OUR BOOTH N3 510 Dr. Rico Boehme Head of Global Technical Sales Meyer Burger 49 174 3437284 Meyer Burger , SNEC 2019, Shanghai, June 2019 I thank all of Meyer Burger‘s customers for their trust RD team at Meyer Burger SERIS Meyer Burger booth N3 510