新格拉斯异质结工程概要

SINGULUS TECHNOLOGIES AG May 20th, 2020 - 1 - confidential SUMMARY HETEROJUNCTION PROJECT GENERIS PVD 10000 / SILEX II CLEANTEX8000 June 28th, 2020 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 2 - confidential SILICON HETEROJUNCTION SOLAR CELLS PVD EQUIPMENT „GENERIS PVD 10000“ PVD 产能 10000片每小时 2 GW 只要 4台： 节约 : 员工人数 。 节约 : 洁净厂房面积 。 节约 : 自动化台数 。 节约 : 厂务配管 。 实证效率高于 24% 靶材利用率 》 83% -行业最高 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 3 - confidential SILICON HETEROJUNCTION SOLAR CELLS Wet EQUIPMENT „SILEXII –CLEANTEX 8000“ 湿法设备： 产能 8000片每小时 2 GW 只要 5台： 节约 : 员工人数 。 节约 : 洁净厂房面积 。 节约 : 厂务配管 。 实证效率高于 24% 创新的纯臭氧工艺 -运行成本 低 纯水消耗一片 1升左右 。 1台节约化学品 400万 。 5台节约 2000万一年 。 SINGULUS TECHNOLOGIES AG May 20th, 2020 - 4 - confidential SINGULUS TECHNOLOGIES AG Your Partner for Process Development and R&D Capabilities Wet Processing Laboratory Capabilities Material characterization and chemical analysis  Offline Titration  Light microscope  Reflectivity measurement  Infrared camera  Sheet resistance measurement (4-point probe)  Further measurement equipment available by HQ or 3rd party  Alkaline and acidic cleaning and etching  Ozone cleaning and etching  Rinse (QDR and overflow)  Drying (N2 / CAD / Vacuum)  Special Process Assembly possible PVC Laboratory Capabilities  DC sputtering with Planar Cathode  DC sputtering with Rotatable Cathode  pDC/BP ( Bipolar) sputtering with Rotatable Cathodes  RF sputtering with Planar Cathode  Metallic and Reactive Mode  Substrate temperature up to 300 °C  Sputter gases : Ar , O2, N2, Ar/H2 All components identical with mass production tool SINGULUS CAN OFFER JOINT R&D, TESTING AND SAMPELING FOR PVD AND WET PROCESSING SINGULUS TECHNOLOGIES AG May 20th, 2020 - 5 - confidential SILICON HETEROJUNCTION SOLAR CELLS COMBINE „GENERIS PVD 10000“ + SILEX II CLEANTEX 8000 SINGULUS IS VERY INTERESTED IN COMBINING ITS EQUIPMENT, TECHNOLOGY AND COMPETENCE IN HETEROJUNCTION TECHNOLOGY AT YOUR PROJECT SINGULUS TECHNOLOGIES AG May 20th, 2020 - 6 - confidential SILICON HETEROJUNCTION SOLAR CELLS COMBINE „GENERIS PVD 10000“ + SILEX II CLEANTEX 8000 感谢您的关注 THANK YOU FOR YOUR ATTENTION