硅片PL自动分选机简介_20110803

3SystemsPL2011.3PL-B56 3i SystemsConfidential3isystems 2PL B56PECVD3200Lx 1300WPL IRPL,50um 1500 /3i SystemsConfidential3isystems 364PL IR800Lx 800W 600L x 600W50um300um 1500 / 1500 /3i SystemsConfidential3isystems 4Item Specificationlity Productivity 1500 pcs/hToolStabiHardware stability in production Wafer breakage rate 98Stability MTBF /MTBF MTTR 95alityImage acquisition Image qualityImage capture time 98.5Black edgeC kAc CrackafetyAlarm system Light and soundSystem protection for operation errors S/W H/W protections3i SystemsConfidential3isystems 5SSystem recovery No data losePL900pixel6060 900pixel3i SystemsConfidential3isystems 6A.53.9 54.5900pixel56.9 53.9p40603i SystemsConfidential3isystems 7B. 60.5 60.6900pixel60.9 60.9p603i SystemsConfidential3isystems 8C. PLwafer3i SystemsConfidential3isystems 9Bare wafer PL IR3Eff Voc Isc wafer1 0.1579 0.00185 0.6122 0.00172 7.976 0.04109 582 4060 0.1607 0.0026 0.6135 0.00385 8.072 0.07943 1223 60 0.1622 0.00281 0.6146 0.0041 8.126 0.08222 883i SystemsConfidential3isystems 103i 3i PLELPhoton International2010 13i3i PLPL3i3i SystemsConfidential3isystems3i SystemsConfidential3isystems 12