5.太阳能炉温跟踪 Insight 软件减反射涂覆（PECVD）标准报告

Data Collection Details Created By Download Number of Probes 6 Sample Interval 000.50 mmss.t Data Loaded 10/09/2010 105005 Collection Started 10/09/2010 104340 Max. Internal Temp. 55.2 C Logger Datapaq Q18 Logger ID 25518 Operator Rob Process example anti reflective Furnace Sputtering Recipe Sputtering Recipe Product Solar cell Time Printed 29/06/2011 161658 Notes Approved By Probe Map 10.0x10.0 cm x y 1 1.0 4.6 2 7.7 2.2 3 8.7 8.8 4 7.8 0.4 5 9.3 3.3 6 5 4 3 2 1 Zone Length mmss.tt Upper C Lower C Evacuation 0007.96 30.0 30.0 Heating 0032.14 550.0 550.0 Plasma 1 0056.72 375.0 375.0 Plasma 2 0106.02 350.0 350.0 cooling 0056.11 50.0 50.0 Exit 0038.32 30.0 30.0 Datapaq Insight Solar Tracker v7.05 Copyright C Datapaq 2002-2011 Page 1 of 1 File Exam ple AR coating.paq Company Datapaq Site Cambridge Process exam ple anti reflective Product Solar cell Probe Anti-reflective Positive Slope C/sec Positive Slope Time mmss.tt Time Above 400.0C mmss.tt Peak Temperature C Mean Slope 350.0 - 300.0C C/sec Delta T C Negative Slope C/sec 1 C 2 C 3 C 4 C 5 C 14.88 15.70 22.17 14.77 15.43 0010.50 0004.50 0004.50 0010.50 0010.50 0000.00 0000.00 0019.50 0000.00 0000.00 376.6 395.8 423.3 388.5 378.4 -0.81 -0.18 -0.15 -0.18 -0.73 -7.62 -8.13 -8.99 -8.14 -7.66 46.7 Rise / Fall 300.0 To 350.0C Fall Time mmss.tt Falling Slope C/sec Time Between mmss.tt 0046.50 0140.00 0133.00 0138.00 0048.00 -1.03 -0.53 -0.57 -0.53 -1.04 0055.50 0146.50 0136.50 0145.00 0056.50