【CITPV】The path to 25%_PVtech_Yifeng_天合陈奕峰

p 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 1 Passivated contacts the path to 25 large-area industrial crystalline silicon solar cellsYifeng Chen, Daming Chen, Chengfa Liu, Zigang Wang, Yang Zou, Yu He, Yao Wang, Jian Gong, Ling Yuan, Guanchao Xu, Xueling Zhang, Yang Yang, Pietro P Altermatt, Zhiqiang Feng and Pierre VerlindenState Key Lab of PV Science and Technology, Trina SolarCorresponding yifeng.chen01trinasolar.com2019 CITPV, Hangzhou, China 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 2 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 2 Overview of current champion Lab cellsl HJT 25.1, Kaneka 2015 l IBC 25.2, SunPower 2015l PERL 25, UNSW 2001 [1] Zhao et al., SOMAT, P429, 2001 [2] Smith et al., IEEE PVSEC, 2014 [3] Adachi et al., APL 233506, 2015 [4] Richter et al., SOLMAT, P96, 2017 l TOPCon 25.8, Fraunhofer 2017 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 3 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 3 Overview of current champion Lab cellsl HJT 25.1, Kaneka 2015 l IBC 25.2, SunPower 2015l PERL 25, UNSW 2001 [1] Zhao et al., SOMAT, P429, 2001 [2] Smith et al., IEEE PVSEC, 2014 [3] Adachi et al., APL 233506, 2015 [4] Richter et al., SOLMAT, P96, 2017 l TOPCon 25.8, Fraunhofer 2017l Hetero IBC 26.7, Kaneka 2017l Passivated contact IBC 6.1 , ISFH 2018 [5] Yoshikawa et al., Nat Energy, 17032, 2017 [6] ISFH, 2018One way to have innovation is to go across the “boundary”. 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 4 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 4 Overview of current champion Lab cellsl HJT 25.1, Kaneka 2015 l IBC 25.2, SunPower 2015l PERL 25, UNSW 2001 [1] Zhao et al., SOMAT, P429, 2001 [2] Smith et al., IEEE PVSEC, 2014 [3] Adachi et al., APL 233506, 2015 [4] Richter et al., SOLMAT, P96, 2017 l TOPCon 25.8, Fraunhofer 2017l Hetero IBC 26.7, Kaneka 2017l Passivated contact IBC 6.1 , ISFH 2018 [5] Yoshikawa et al., Nat Energy, 17032, 2017 [6] ISFH, 2018 Passivated contact PERX Heterojunction PERX Low cost 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 5 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 5 Large-area 25 IBC cell with passivated contacts in Trinan Total area efficiency of 25.04n First demonstration of 25 screen-printed on 156mm Cz wafer Independently confirmed by JET, 2018 Trina 25.04IBC, 156 156 mm2 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 6 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 6 Overview of current champion Lab cellsl HJT 25.1, Kaneka 2015 l IBC 25.2, SunPower 2015l PERL 25, UNSW 2001 [1] Zhao et al., SOMAT, P429, 2001 [2] Smith et al., IEEE PVSEC, 2014 [3] Adachi et al., APL 233506, 2015 [4] Richter et al., SOLMAT, P96, 2017 l TOPCon 25.8, Fraunhofer 2017l Hetero IBC 26.7, Kaneka 2017l Passivated contact IBC 6.1 , ISFH 2018 [5] Yoshikawa et al., Nat Energy, 17032, 2017 [6] ISFH, 2018 Passivated contact PERX Heterojunction PERX Low costIBC 0 front contact shadingfront/rear contact 3 of front contact shading 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 7 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 7 Overview of current champion Lab cellsl HJT 25.1, Kaneka 2015 l IBC 25.2, SunPower 2015l PERL 25, UNSW 2001 [1] Zhao et al., SOMAT, P429, 2001 [2] Smith et al., IEEE PVSEC, 2014 [3] Adachi et al., APL 233506, 2015 [4] Richter et al., SOLMAT, P96, 2017 l TOPCon 25.8, Fraunhofer 2017l Hetero IBC 26.7, Kaneka 2017l Passivated contact IBC 6.1 , ISFH 2018 [5] Yoshikawa et al., Nat Energy, 17032, 2017 [6] ISFH, 2018 Passivated contact PERX Heterojunction PERX Low costIBC 0 front contact shadingfront/rear contact 3 of front contact shadingPassivated contact PERX Bifacial 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 8 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 8 The comparison of poly-Si and a-Si passivationPoly Si a-SiPassivation structure thin SiOx/poly-Si n/p a-SiH i/a-SiH n/pPassivation effect [1] J0,e 2.7 fA/cm2 n J0,h 16 fA/cm2 p J0,e 2 fA/cm2 nJ0,h 2 fA/cm2 pTypical cell structure/ Best Lab eff TOPCon 25.8 FhG-ISE HIT 25.1 KanekaFeatures High temp.Good J scRelative low VocGood FF Low temp.Low Jsc TCO/a-Si abs.Good VocRelative low FF TCOTo today’s PV industry Evolutionary Relative low capex RevolutionaryHigh capexIndustry status This work Med cell eff 23.4 Meyer BurgerMed. Mod. eff 19.4 325W Panasonic [1] J. Schmidt et al., SOLMAT 187 2018 39 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 9 The development of TOPCon J0e,pass 11-15 fA/cmJ0e,metal 200 fA/cmTOPCon J0,cont 7 fA/cmn-Si, W 200 mp Tunnel oxiden-Si Base Amorphous/Polycryst.Si n-LayerECEFEV n Ultrathin tunnel oxide using HNO3 n Polysilicon by PECVDn 800 C annealingn Jo, TOPCON 4 fA/cm2 n Full-area rear contact with evaporated Agn Best Lab cell [8] 25.8 efficiency with 724 mV Vocp Tunnel Oxide Passivated Contact from Fraunhofer [7]p The early pioneer studies of SiOx/poly-Si was inspired from semiconductor [1] in 1980s [2-6][1] T. Matsushita et al., JJAP 1976[2] R.M. Swanson, Materials research at Stanford University 1979[3] M. A. Green et al, Solar Cells, 1983[4] E. Yablonovitch et al. APL 1985.[5] N.G. Tarr et al., IEEE Electron Dev. Lett. 6 P655, 1985.[6] J. Y. Gan et al., 21st IEEE PVSC, P245, 1990 [7] F. Feldmann et al., EU PVSEC 2013[8] ] A. Richter, et al., SOLMAT, 2017p SiOx/poly-Si becomes hot topics among institute and industry. 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 10 Industrial tunnel oxide passivated contact i-TOPCon celln Bifacialn N-type Cz wafer n Front boron emittern Rear SiOx/poly nn J0,R 700mVn Front η 23 i-TOPCon cell by Trina solar 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 11 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 11 Passivation and metallization study of SiOx/Poly-SiDevelopment of ultra-thin SiOx/poly passivation technology in Trina n Study since 2015n 5 Ωcm n-type Cz wafern 1.5nm SiOx/ in-situ poly n by LPCVDn Passivated by SiN xHPlanar surfacen-type Cz wafer5 Ωcm SiOx [1] Yang et al., AIP Conference Proceedings 19991040026 [2] D. Chen et al., SNEC, 2019Poly-Si nSiNxH 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 12 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 12 Passivation and metallization study of SiOx/Poly-SiDevelopment of ultra-thin SiOx/poly passivation technology in Trina n Study since 2015n 5 Ωcm n-type Cz wafern 1.5nm SiOx/ in-situ poly n by LPCVDn Passivated by SiN xHn Excellent passivation increase tp to 36 ms [1] J0 2 fA/cm2 planar [2]Planar surfacen-type Cz wafer5 ΩcmSiNx n-type poly-Si SiOx Δn [1] Yang et al., AIP Conference Proceedings 19991040026 [2] D. Chen et al., SNEC, 20191.3 fA/cm2 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 13 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 13 Passivation and metallization study of SiOx/Poly-SiDevelopment of ultra-thin SiOx/poly passivation technology in Trina n Study since 2015n 5 Ωcm n-type Cz wafern 1.5nm SiOx/ in-situ poly n by LPCVDn Passivated by SiN xHn Excellent passivation increase tp to 36 ms [1] J0 2 fA/cm2 planar and 4 fA/cm2 textured [2]Planar surfacen-type Cz wafer5 ΩcmSiNx n-type poly-Si SiOx Δnn-type Cz wafer5 Ωcm SiNx n-type poly-Si SiOxTextured surface Δn [1] Yang et al., AIP Conference Proceedings 19991040026 [2] D. Chen et al., SNEC, 2019 1.3 fA/cm23.7 fA/cm2 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 14 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 14 Passivation and metallization study of SiOx/Poly-SiDevelopment of ultra-thin SiOx/poly passivation technology in Trina n Study since 2015n 5 Ωcm n-type Cz wafern 1.5nm SiOx/ in-situ poly n by LPCVDn Passivated by SiN xHn Excellent passivation increase tp to 36 ms [1] J0 2 fA/cm2 planar and 4 fA/cm2 textured [2]n 0.7 mΩcm2 contact resistivity by TLM [3] [1] Yang et al., AIP Conference Proceedings 19991040026 [2] D. Chen et al., SNEC, 2019[3] D. Chen et al., to be published, 2019 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 15 Large-area champion 24.58 BIFACIAL i-TOPCon cellLab development Independently confirmed by ISFH CalTeC, 2019 2019 Trina Solar. All rights reserved. CONFIDENTIAL. Acell 244.62 0.98 cm2ηfront 24.58 0.34 ηrear 19.48 0.27 10000.00.02000.04000.06000.08000.0 0 200 400 600 80010000.00.02000.04000.06000.08000.0Current / [mA] Power p / [mW]Voltage V [mV]Area [cm2] Voc [mV] Jsc [mA/cm2] η []Front 244.62 716.8 40.57 24.58Rear 711.8 33.06 19.48 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 16 The questions for industrialization of TOPConThe process of industrial TOPCon cell is undefined, Substraten P-typen N-type 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 17 The questions for industrialization of TOPConThe process of industrial TOPCon cell is undefined, Thin oxiden Wet-chemical n UV n Thermal n PECVD n LPCVD n in-situ dopingn Ex-situ dopingn AnnealingPoly siliconSubstraten P-typen N-type 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 18 The questions for industrialization of TOPConThe process of industrial TOPCon cell is undefined, Thin oxiden Wet-chemical n UV n Thermal n PECVD n LPCVD n in-situ dopingn Ex-situ dopingn AnnealingPoly silicon Metallizationn Evaporation n Screen printing n TCO Others n Cell structuren Process flown Indus. maturity n Yieldn CostSubstraten P-typen N-type 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 19 The questions for industrialization of TOPConThe process of industrial TOPCon cell is undefined, just like PERC in 2014Thin oxiden Wet-chemical n UV n Thermal n PECVD n LPCVD n in-situ dopingn Ex-situ dopingn AnnealingPoly silicon Metallizationn Evaporation n Screen printing n TCO Others n Cell structuren Process flown Indus. maturity n Yieldn CostSubstraten P-typen N-type Passivationn AlOxHn Thermal SiO2n SiOxNyH n SiNxH capping n ALDn PECVD n PVDAlOx Metallizationn LFCn Laser/chem. openingn Evaporation n Screen printing Others n Cell structuren Process flown Indus. maturity n Yieldn CostSubstraten P-typen LIDTOPConPERC in 2014 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 20 Industrial tunnel oxide passivated contact i-TOPCon cellHigh Eff. cells Wafer quality controlCleanness of environment and facilities Good design of cell structure Fine tune of processing parameters Good control of production operationStability of equipment Contamination control is critical The path to industrialization of i-TOPCon 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 21 Industrial tunnel oxide passivated contact i-TOPCon cellIncrease Eff. 0.7 abs., Voc 20 mV over PERCi-TOPCon cells in mass production with 23 efficiency in Trina solar in March, 2019 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 22 Industrial tunnel oxide passivated contact i-TOPCon cellThe key advantage of i-TOPCon n Eff vs J 0 plot for production line cellsn J0,total of PERC 120-150 fA/cm2n J0,total of i-TOPCon 50-100 fA/cm2n Reduction of J0,total is the key to improve efficiency and Voc0, exp 1sctotal ocBJJ qVnk T     2017 Trina Solar. All rights reserved. CONFIDENTIAL. 23 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 23 Contact passivation a must for J050 fA/cm2 Front/rear contact PERC todayAssuming Jph 42 mA/cm2Rs 0.55 Ωcm2J0,cont 800 fA/cm23 front/rear contact i-TOPConLimited by contact recombinationImprove Jph Improve J0 Best Labi-TOPConimpro. opt 2019 Trina Solar. All rights reserved. CONFIDENTIAL. 24 天 合 光 能 全 新 高 端 产 品 i-TOPCon组 件全 新 高 端 组 件 产 品 40W with 10 bifacial gain N型 i-TOPCon电 池 MBB 切 半 质 保高 可 靠 性低 温 度 系 数LID双 面 双 玻 355W60 片 版 型正 面 功 率 425W72 片 版 型正 面 功 率1 30年20.672片 版 型最 高 组 件 效 率 2019 Trina Solar. All rights reserved. CONFIDENTIAL. 25 Low light induced degradation LIDTrina Solar’s i-TOPCon VS conventional PERC 60708090100 0 5 10 15 20 25 30YearsGuaranteed Power[] 22.75.83.8 4.82.8 2019 Trina Solar. All rights reserved. CONFIDENTIAL. 26 Low temperature coefficients 707580859095100 30 40 50 60 70 80 90 100 Trina Solar’s i-TOPCon VS conventional PERC Module temperature[℃ ]Normalized Power[ ] 0.32 0.7 1.1 2019 Trina Solar. All rights reserved. CONFIDENTIAL. 27 High bifacial gain 050100150 100 200 300 400 500Rear illumication[W/m2] Trina Solar’s i-TOPCon VS conventional PERC bifacial9 W 18 W 27 W 36 WRear Power[Wp] 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 28 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 28 i-TOPCon发 电 量 模 拟 测 试 0.00 1.00 2.00 3.00 4.00 5.00 6.00 0 2 4 6 8Daily PR gain [] Dailiy irradiation [kWh/kWp] gain vs irr Time PERC [kWh/kWp] i-TOPCon[kWh/kWp]Size 1690.1W 1708.1W5/25-8/18 [kWh/kWp] 290.8 299.8Gain 0baseline 3.1p Location Changzhou, China E119 58′ N31 48′p Grass groundp Installation Angle 27p 2-5 performance ratio gain over PERC bifacial on grass based on 18 days measurement 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 29 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 29 i-TOPCon发 电 量 模 拟 测 试 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 30 2017 Trina Solar. All rights reserved. CONFIDENTIAL. 30 i-TOPCon发 电 量 模 拟 测 试/p