异质结量产设备 OAK-U-5和 OAK-DU-5(报告人-胡宏逵-上海理想万里晖薄膜设备有限公司)

Confidential Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved 上海理想万里晖薄膜设备有限公司 2018 11 南昌大学 胡宏逵 , 耿茜 Design Concepts And Status of SHJ Tools OAK-U-5 And OAK-DU-5 Ideal Energy Shanghai Sunflower Thin Film Equipment Ltd. Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential The Design Concepts of IE OAK-U Series  In-line vs. cluster  Gen 5 vs. Gen 6 or .  Productivity and drawbacks  Floor space  Wafer-tray management  Alternated way to increase productivity  Automation in clean anti-oxidation environment  Vacuum in vacuum vs. single chamber  Very small process chambers 1/8 of single chamber for the same generation, save special gases usage and utility cost, save pump cost  Process chambers could be stacked to increase productivity  Frequency tuning vs. auto tuning  Boron Cross-contamination management Consider these factors, OAK- U series equipment is so designed and customized built for the SHJ integration 2 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Design Concepts of Oak-U-5 Cassette In Cassette Out HM1 PM1 PM2 HM2 PM3 PM4 3 Gen 5, PM1 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Benefits of Vacuum in Vacuum Box-in-Box Chamber deform Bottom heating Particle formation Larger chamber, more special gases comsumption and facility cost Stringent pump requirement IXH4550 Minimum deform Bottom top heating Smaller chamber 1/8, less gases consumption Undemanding pump requirement IXH 1820 Stack multiple chambers Non uniform chamber temperature RPS clean, non-complete No particle Uniform chamber temperature RF clean vacuum vacuum vacuum Atm. pressure 4 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Drawer-Styled-Process Chamber – Core Unit The design strategy is to developed a series of products, from RD to production tools using the same basic core unit “Process- Chamber” and sharing the basic recipes The process chamber, act as a drawer, can be inserted into any of these tools. Processes developed in RD, easily transferred into production tool Stacked the multiple process chamber to increase throughput 5 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Comparison of Gen. 5 Gen. 6 Gen 5 with Box-in-Box Gen 6 Wafers/tray 56, 7x8 100, 10x10 Tray/chamber 2 or more 1 Throughput/chamber 112 or more 100 Occupied floor space small large Utility cost low high Thermal expansion less more Tray deformation small big Wafers pops-out Less often More often Wafer load automation easy difficult Equipment cost Low high 6 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential IE PECVD Products Roadmap RD PINE-M-R-5 60MW OAK-U-5 120MW OAK-DU-5 Launch in 2019 7 23.73 efficiency Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential OAK-U-5 Production Status 8 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential 理想万里晖异质结 PECVD设备客户评价  2018年 8月， JET认证电池效率 23.7，电池平均效率超过 23.5；  120MW产线在 H客户处产能 已达 3100片 /小时 ；  客户评价设备性能优异、稳定性良好，已稳定辉光 2万小时 以上；在持续 45天准中试生产中设备表现优异，效率突破 23 配国产 PVD设备 ；  2017年 8月，在理想万里晖的 PECVD上制备出的 HIT电池效率 经德国 Fraunhofer认证达到 22.83  2017年 8月， H公司一致决定与理想万里晖签订 600MW重复 订单。  至目前共签订 1.8GW订单 9 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Certified Champion Cell 8/2018 Bifacial layout, 5BB PVD sputtered ITO 9010 Screen printed electrodes No DARC 10 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential 11 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential OAK-U-5 Orders and Manufactured Status Delivered 600 MW, in which,120 MW is running pre- production with 22.5 Ave. efficiency and tact-time 135 sec. 7 Received 1.8 GW orders 22,000 M2 manufacture facility built 600 MW under construction Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Introduction of OAK-DU-5 13 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential 理想万里晖叠 10层 PECVD在客户产线运行 PINE-AM-C-5 14 对 应 10 层 反 应 腔 10 个 观 察 窗 分 别 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential 理想万里晖叠 10层的 PECVD设备 叠 10 层 反 应 腔 15 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential 理想万里晖成熟的叠多层 PECVD技术  叠 10层 PECVD设备是成熟产品， 2011年已 推向客户产线；  单层、叠 2层 至叠 10层都是成熟技术。  与其他公司 TFT面板行业 PECVD设备不同， 理想万里晖用了近 7年时间，为异质结量身打 造专用 PECVD设备。 16 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Stacked Process Chambers 17 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential OAK-DU-5 Tact time 135 S Target throughput 3000 wafer/hr 156mm Target efficiency 23 Up time 90 18 Copyright 2009 Ideal Energy Equipment Shanghai Ltd, All Rights Reserved Confidential Thank you 19