氮化硅薄膜的PECVD生长及其性能研究
1994-2007 China Academic Journal Electronic Publishing House. All rights reserved. http//www.cnki.net 1994-2007 China Academic Journal Electronic Publishing House. All rights reserved. http//www.cnki.net 1994-2007 China Academic Journal Electronic Publishing House. All rights reserved. http//www.cnki.net