HIT太阳能电池的发展概况

HIT 澶 槼鑳界數姹犵殑鍙戝睍姒傚喌 * 鍙插皯椋�, 2 , 鍚寸埍姘�, 2, 3, 寮犲 瀹� , 2 , 濮�. 杈�, 4 1 澶ц繛鐞嗗伐澶у鏉愭枡绉戝 涓庡伐绋嬪 闄� 澶  ц繛116024; 2 澶ц繛鐞嗗伐澶у涓夋潫鏉愭枡鏀规€ф暀鑲查儴閲嶇偣瀹為獙瀹 澶� ц繛116024; 3 杈藉畞鐪佸お闃宠兘鍏変紡绯荤粺閲嶇偣瀹為獙瀹 澶� ц繛116024; 4 寰峰浗閿℃牴澶у鏉愭枡宸ョ▼瀛﹂櫌, 寰峰浗閿℃牴57056 鎽樿� 闃愯堪浜嗗紓璐ㄧ粨 HIT 澶 槼鑳界數姹犵殑缁撴瀯涓庣壒寰� 骞朵粠寮傝川缁撹兘甯︾粨鏋勭殑浼樺寲銆侀潪鏅剁 灞傜殑鍒跺 鏂规硶銆佽儗� �闈㈠満 BSF 鐨勭爺绌 €佽 鏂 殑 鍙戝 鏋 鏂 殑闈 夋 闈 H IT 澶 槼鑳界數姹犵殑 € 灞 € �  HIT 鐨涓⁄寲 ƒcurrency1“ , 骞跺睍 H IT 澶 槼鑳界數姹犵殑 ‹鍙戝睍›嬪 fi銆�鍏fl –�. H IT 澶 槼鑳界數姹� . 寮傝川缁†粨鏋�涓 ‡鍒 鍙�  TM615 鏂‚„” �A Overview of the Development of HIT Solar Cells SHI Shaofei1, 2 , WU Aimin1, 2, 3 , ZHA NG Xueyu1, 2 , JIANG Xin1, 4 1 Schoo l of M aterials Science and Eng ineering , Dalian Univer sity o f Techno log y, Dalian 116024; 2 Key Laborat or y of Materia ls Modification, Dalian Univer sity o f Techno log y, Dalian 116024; 3Key Laborato ry of So lar Photov oltaic Systems, Liaoning Pr ovince, Da lian 116024; 4 Institut e o f Mater ials Engineering ,Sieg en Universit y, Siegen 57076, Germany Abstract The structur e and cha racteristics o f HIT so lar cells ar e intro duced and summarized the status o f technolog y development f rom the aspects below the o pt imization of hetero junction band str ucture, the preparat ion method of amor phous silicon lay er , the study o f the back surface field, t heselection of subst rate mat erial and the inno vatio ns o f emitter mater ial. At last the status of their indust rializatio n and pr ospects of the H IT solar cells have been rev iewed. Key words H IT, solar cells, hetero junctio n str uctur e * ‰宸ョ▼ € 浗瀹剁閲嶇偣瀹為獙瀹 閲�  9140C540105080C5402 ; 涓 ˆ˜˘绉˙爺涓⁄璐 ˚ ˝閲˛˝ˇ �DUT10JN08 鍙插皯椋 � � 1986 骞寸, 涓 寮傝川缁 お闃宠兘 currency1� � Email shao feishi 126. com 鍚寸埍姘 € � � 1973 骞寸, ⁄ , 暀 � 涓 � 澶 槼鑳界數姹犵爺绌�  . 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H. Wang 塠 15] 閲ƒ鐑 笣Œ炲己鍖 姘浉   Н HWCV D € �鍒跺 浜唒 嬭 殑� HIT 銆備笌PECVD 鐩 瘮, HWCVD 浜�熺殑 瀛愯兘閲忚 鑳 鏁堥鍏嶇 瀛愮殑杞板嚮� � � , 鍚屾椂鍙 �“簬 鐞 „〃闈 殑 兘 熷瓙姘 鍒跺 ▼涓殑 杈� � � � �灏 涓嶆 � Si H ‹ 銆 澶� 缇庡浗˛界 宸 澶  у鐨�B. Jagannathan 塠 16] ƒ鐩存 婧呭 € 埗澶  p �HIT , 鍦�. 3cm2 鐨 ‰绉 笂寰 浜� 50mV 鐨 數 嬪拰30mA/ cm2 鐨勭 數娴併€� 3 鑳岄‰鍦 �BSF 鐨勭爺绌�鑳岄‰鍦 兘鏀 鑳岄‰澶嶅 熺巼 ⁄儗‰鍙嶅 , €屾彁樺 數 €佸�澶 х 數娴併€傚埗澶„儗闈㈠満鐨缁 ł 閾 閲�ł€佺 ˘ ˙ł€佺 ˘ ˙ł 瓑, 浜 伐 兘 € 侀 繃绋 鍙� �鑳藉 鍒跺 鑳岄‰鍦哄啀 � Н闈炴櫠 €備笌HIT 庢‰宸ヨ壓鍏 鐨 埗澶囧伐 轰富 鍦崟鏅剁�鑳岄‰  Н閲嶆 鏉傞潪鏅剁 � �Ł鎴愯儗闈㈠満銆 oru Sawada 塠 17] ECVD ł 湪n 嬭 �涓 埗澶囧嚭HIT 缁撴瀯 i/ n aS i 鐨 儗闈㈠満銆傝 鑳岄‰鍦哄埄 “ 寮�璐ㄧ粨鐨勭壒鎬 涓ˆ渶 侀 灏 兘› 垚銆傜粨鏋 � � HIT 缁撴瀯鑳岄‰鍦 揪鍒 姣 姘ч挐鍖 濂界殑‰ 寲鏁銆. Ves chet ti 塠18] ƒ鍏 ⁄銆佺 绂诲瓙ł瀹 浜嗗ƒcurrency1儗闈㈠満 L ocal BSF , 涓庡闈 Н Full 閾 閲˛儗闈㈠満鐩 瘮, 寮€ 數 嬪ぇ澶 ф彁 杈惧 浜� �76mV, 涓“ IT 寮€ 數 嬬殑 €樺€‹€�H. D. Goldbach 塠19] cSi 鍒朵›浜唒 IT 鐨 儗闈㈠満銆傚洜涓�.cSi 姣fiS i 夋 殑 鏁堢巼, ˘€ ヨ兘瀹 �娴 鐨勬 鏉 €岄檷 庢fl娲 兘� , › 垚鎬ц兘浼樿 鐨 儗闈㈠満, 鎻愰 杞 崲鏁堢巼銆 暟– ā†熺粨鏋 〃 鍦‡ 嬭 � IT 鐨�鑳岄‰Œ炲 涓€灞傞 鐨 灞傚彲 ヨ鍒‚儗闈㈠満鐨› „數�姹犵殑鏁堢巼鎻愰 鍒�4. 35[ 20] 銆� 4 鏉愭枡鐨 €  鐨勭 ”鍚� 鐨 浆 晥 涓嶅悓銆  ucci M 塠21] currency1鍙˙ , n 嬭 殑HIT 簬寮傝川缁撹兘甯︾粨鏋�鏂归‰鐨紭ˇ 鍏惰浆 晥‰簬� p 嬭 殑澶 槼鑳界數姹� 唒 嬭 お闃宠兘 –†晫闈 殑 ‹杈冧綆, 鍥 撲簬鍒跺�銆  . H. Wang 塠 15] 鍒嗗埆 嬪 �FZ 呭拰鐩存 CZ › 鍒舵垚浜 IT , 缁撴鍙˙ 涓 Z 呭お闃崇數姹犵殑鏁堢巼�HIT 澶 槼鑳界數姹犵殑鍙戝睍姒傚喌 / 鍙插皯椋 瓑 131 浜Z 呫€傜編鍥藉浗瀹跺彲 嶇鑳 瀹為獙瀹ˆ殑Wang Q i 塠 9] �H WCV D ł 湪FZ 涓 埗澶殑 HIT 澶 槼鑳界數姹犵殑鏁堢巼宸�杈惧 19. 1銆備˜ Z currency1殑 锋˘簬CZ 鍥 ˙ 粠鏁堢巼�屾垚 鏂归‰缁 鑰 ˚ , 夋鍚堥€傜殑 銆傚 澶� 涓轰 鍑忓˝– 灏 厜鐨 ˛灏勭巼, 缁掗‰ 熻� ƒ鍒ˇ IT 涓 �骞朵笖鍙 浜嗗濂界殑鍑忓˛灏勬晥鏋 10, 22] 銆� 5 鍙戝 鏋 鏂 殑闈 涓轰 鍑忓皯闈炴櫠 呭‹– 灏 厜鐨 鏀 鍙Œ˜ 甯﹂ 鏉愭枡�傚 鏅剁� cSi 銆佺 鏅剁� ncSi 変›涓哄 灏勬 , 鎻愰 鍏 殑 �巼銆 . Summont e 塠 23] FPECVD € 繃 姘� �绋€閲婄殑姘 , 鍦 嬭 曚笂鍒跺 浜 � �.cSi 鍙戝 鏋 缁撴 � �涓 � Si 鍙戝 鏋佺浉姣�H IT 鐨勭 數娴佸拰杞 崲鏁堢巼 � 庢 鎻愰 銆備腑绉 櫌 撴墍 � 塠  24] 熺ƒRFPECVD 鍦 嬭 曚笂鍒跺 鍑轰 � n cS i 鍙戝 鏋併€傞 PECVD ł曚互澶 涓� �绉 櫌currency1 櫌鐨 缇 塠25] ƒHWCV D ł 埗澶 cSi 鍙戝 鏋併€傚 澶 �J. 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